Nanotechnology 8 Nanostructured surfaces

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Datensatz im Suchindex

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adam_text Contents Preface XIII List of Contributors XV Part One Тор -Down Strategy 1 1 Тор -Down Fabrication of Nanostructures 3 Ming Liu, Zhuoyuji, and Uwei Shang 1.1 Introduction 3 1.2 lithography 3 1.2.1 Photolithography 4 1.2.1.1 Contact Printing 6 1.2.1.2 Proximity Printing 7 1.2.1.3 Projection Printing 7 1.2.1.4 Resolution Enhancement Techniques (RETs) 7 1.2.1.5 Optical Proximity Correction (OPC) 10 1.2.2 Electron Beam Lithography 11 1.2.3 Х -Ray Lithography 13 1.2.4 Focused Ion Beam (FIB) Lithography 16 1.2.4.1 Direct-Write Milling 16 1.2.4.2 Dry Development FIB Lithography 17 1.3 Two-Dimensional Nanostructures: Thin-Film Deposition 17 1.3.1 Fundamentals of Film Growth 18 1.3.2 Physical Vapor Deposition (PVD) 20 1.3.2.1 Vacuum Evaporation 21 1.3.2.2 Molecular Beam Epitaxy (MBE) 23 1.3.2.3 Sputter Deposition 25 1.3.3 Chemical Vapor Deposition (CVD) 27 1.3.3.1 Reaction Kinetics 28 1.3.3.2 Variants of CVD Methods 29 VI Contents 1.3.3.3 Advantages of CVD 30 1.3.4 Atomic Layer Deposition (ALD) 31 1.3.4.1 ALD Process 31 1.3.4.2 Types of ALD Reaction 32 1.3.4.3 Advantages and Disadvantages 34 1.4 Pattern Transfer 35 1.4.1 Etch 36 1.4.1.1 Wet Etching 36 1.4.1.2 Dry Etching 38 1.4.1.3 A Comparison of Wet and Plasma Etching 42 1.4.2 Lift-Off Processes 42 References 43 2 Scanning Probe Microscopy as a Tool for the Fabrication of Structured Surfaces 49 Claudia Haensch, Nicole Herzer, Stephanie Hoeppener, and Ulrich S. Schubert 2.1 Introduction 49 2.2 Structuring with Self-Assembled Monolayers 58 2.2.1 Dip-Pen Nanolithography 58 2.2.1.1 Thermal Dip-Pen Nanolithography 61 2.2.1.2 DPN with Biomolecules 63 2.2.1.3 DPN with Polymers 64 2.2.1.4 DPN with Fluorescent Dyes 65 2.2.1.5 DPN in the Field of Electrolytes 65 2.2.1.6 DPN with Nanomaterials 65 2.2.1.7 Chemical DPN 66 2.3 Structuring of Self-Assembled Monolayers 67 2.3.1 Nanoshaving 67 2.3.2 Nanografting 70 2.3.3 Electro-Oxidative Lithography 73 2.3.3.1 Local Anodic Oxidation 73 2.3.3.2 Chemical Activation of Self-Assembled Monolayers 77 2.3.4 Catalytic Lithography 85 2.4 Surface Chemical Reactions for Structured Surfaces 89 2.4.1 Molecular Overlayers - Functionalization - Precursors 90 2.4.2 Surface Chemistry 94 2.4.2.1 Substitution 94 2.4.2.2 Click Chemistry 96 2.4.2.3 Esterification/Amidation 97 2.4.2.4 Schiff Base Reactions 99 2.4.2.5 Formation of Thioureas and Ureas 100 2.4.2.6 Oxidation 100 2.4.2.7 Photochemistry 101 2.4.2.8 Polymer Brashes 102 Contents VII 2.4.2.9 Others 108 2.4.3 Multífunctíonality 109 2.5 Summary and Outlook 111 References 111 3 Physical, Chemical, and Biological Surface Patterning by Microcontact Printing 125 Jan Mehlich and Bartjan Ravoo 3.1 Introduction 125 3.2 What is Microcontact Printing? 126 3.2.1 The Master 126 3.2.2 The Stamp 127 3.3 Inks and Stamps for Microcontact Printing 130 3.4 Microcontact Printing and Soft Lithography 137 3.5 Microcontact Printing and Biological Arrays 143 3.6 Microcontact Printing and Surface Chemistry 150 3.7 From Micro to Nano: Increasing the Resolution of Microcontact Printing 154 3.8 Conclusions and Outlook 158 References 159 4 Advances in Nanoimprint Lithography: 2-D and 3-D Nanopatterning of Surfaces by Nanoimoprint Lithography, Morphological Characterization, and Photonic Applications 165 Vincent Reboud, Timothy Kehoe, Nikolaos Kehagias, and Clivia M. Sotomayor Torres 4.1 Introduction 165 4.2 Three-Dimensional, Nanoimprint-Based Lithography 166 4.2.1 Background 166 4.2.2 Reverse NIL 170 4.2.3 Reverse-Contact UVNIL 174 4.2.4 The Prospects for 3-D NIL 175 4.3 Metrology for Nanoimprinting 176 4.3.1 Introduction 176 4.3.2 Scanning Electron Microscopy 177 4.3.3 Atomic Force Microscopy 180 4.3.4 Transmission Electron Microscopy 181 4.3.5 Optical Critical Dimension Metrology. Scatterometry 183 4.3.6 Other Methods 182 4.3.7 Physical Properties 184 4.3.8 Residual Layer Thickness in NIL 185 4.3.9 Towards An Integrated Metrology 186 4.4 Two-Dimensional Nanopatterned Polymer Components for Photonic Applications 387 4.4.1 Overview on Applications Realized by NIL 187 VIH Contents 4.4.2 Nanoimprinted Optical Resonators 188 4.4.2.1 Nanoimprinted Polymeric Band-Edge Lasers 192 A A3 Patterning in Functionalized Polymers í 94 4.4.4 Outlook on Nanoimprinted Polymer Devices 197 4.5 Conclusions 198 References 299 Part Two Bottom-Up Strategy 207 5 Anodized Aluminum Oxide 209 Günter Schmid 5.1 Introduction 209 5.2 Fundamentals of Aluminum Oxide Formation 210 5.2.1 Barrier Oxide Layers 210 5.2.2 Formation of Nanoporous Aluminum Oxide 212 5.2.2.1 Mechanism of Formation 212 5.2.2.2 Chemical Composition 2Î6 5.3 Characterization of Nanoporous Aluminum Oxide Membranes 217 5.3.1 Electron Microscopy 227 5.3.2 Atomic Force Microscopy (AFM) 219 5.4 Aluminum Oxide Membranes as Templates 221 5.4.1 Carbon Nano tubes and Nanowires 222 5.4.2 Metal Nanotubes and Nanowires 226 5.4.3 Semiconductor Nanowires 229 5.4.4 Other Materials 231 5.4.5 Nanoparticles 231 5.5 Nanoporous Alumina Membranes as Imprinting Tools 232 5.5.1 Imprinting Techniques and Conditions 233 5.5.2 Imprinting of Metal Surfaces 237 5.5.3 Imprinting of Polymers 240 5.5.4 Special Techniques to Imprint Hard Materials 241 5.6 Properties of Nanoimprinted Polymer Surfaces 242 5.6.1 Optical Properties 242 5.6.2 Wetting Properties 245 5.7 Surfaces with Nanoholes 247 5.8 Summary and Outlook 248 References 249 6 Colloidal Lithography 253 Gang Zhang and Daycmg Wang 6.1 Introduction 253 6.2 Colloidal Crystallization: The Bottom-Up Growth of Colloidal Masks 254 6.2.1 Sedimentation 254 6.2.2 Vertical Deposition 256 Contents IX 6.2.3 Spin Coating 257 6.2.4 Colloidal Crystallization at the Water/Air Interface 260 6.3 Top-Down Modification of Colloidal Masks 261 6.3.1 Controlled Deformation 261 6.3.2 Reactive Ion Etching 262 6.4 Colloidal lithography 264 6.4.1 Colloidal Mask-Assisted Etching 264 6.4.2 Colloidal Mask-Assisted Chemical Deposition 265 6.4.3 Colloidal Mask-Assisted Physical Deposition: Nanosphere Lithography 268 6.4.3.1 Surface Patterning on Planar Substrates 269 6.4.3.2 Surface Patterning on Particles 274 6.4.3.3 Extension of Nanosphere Lithography 278 6.5 Applications of CL 280 6.6 Summary 284 References 285 7 Diblock Copolymer Micelle Nanolithography: Characteristics and Applications 291 Theobald Lohmueller and Joachim P. Spatz 7.1 Introduction 291 7.2 Block Copolymer Micelle Nanolithography 293 7.2.1 Introduction 293 7.2.2 Characterization on Nanoparticle Arrays 295 7.2.2.1 Scanning Electron Microscopy (SEM) 295 7.2.2.2 Atomic Force Microscopy (AFM) 295 7.2.2.3 Spacing and Order of Nanoparticle Arrays 296 7.2.3 Tuning the Pattern Properties 297 7.2.3.1 Controlling the Nanoparticle Spacing 297 7.2.3.2 Controlling the Particle Size 300 7.2.3.3 Micro-Nanopatterned Interfaces 303 7.3 Applications of Nanopatterned Materials 305 7.3.1 Moth Eye Antireflective Surfaces 305 7.3.2 Cells on Nanostructured Interfaces 309 7.4 Conclusions 311 References 313 8 The Evolution of Langmuir-Blodgett Patterning 317 Xiaodong Chen and Lifeng Chi 8.1 Introduction 317 8.2 The LB Technique in Retrospect: From Homogeneous Film to Lateral Features 318 8.3 LB Patterning of Organic Molecules 319 8.3.1 Direct Transfer of Featured Structures Onto Solid Substrates 319 8.3.2 Pattern Formation During LB Transfer 324 X Contents 8.4 LB Patterning of Nanomaterials 327 8.4.1 LB Patterning of Nanoparticles 328 8.4.2 LB Patterning of Nanowires 332 8.5 Application of Structures Formed by LB Patterning 335 8.5.1 Templated Self-Assembly of Molecules and Nanoparticles 335 8.5.2 Pattern Transfer From Chemical to Topographic Patterns 338 8.5.3 Integration of Nanomaterial Patterning in Nanodevice Fabrication 341 8.6 Conclusions and Outlook 343 References 345 9 Surface-Supported Nanostructures Directed by Atomic- and Molecular-Level Templates 349 Dingyong Zhong, Haiming Than, ana üfeng Chi 9.1 Introduction 349 9.2 Atomic- and Molecular-Level Templates on Surfaces 350 9.2.1 Surface Reconstructions and Reconstruction-Related Patterns 351 9.2.1.1 Si(lll)-7 x 7 351 9.2.1.2 Au(lll)-22 χ ^З and the Herringbone Pattern 351 9.2.1.3 Cu(110)-(2 χ 1)O and the Stripe Pattern 352 9.2.2 Strain-Relief Epitaxial Layers 352 9.2.2.1 Boron Nitride Nanomesh 353 9.2.2.2 Ag/Pt(lll) 354 9.2.3 Vicinal Surfaces 355 9.2.3.1 Vicinal Au(lll) Surfaces 355 9.2.4 Surface-Supported Organic Supramolecular Assemblies 357 9.2.4.1 Preparation Techniques 357 9.2.4.2 0-D and 1-D Nanostructures 358 9.2.4.3 2-D Molecular Patterns 360 9.2.4.4 Porous Networks 368 9.3 Surface-Supported Nanostructures Directed by Atomic-Level Inorganic Templates 369 9.3.1 Reconstruction 369 9.3.2 Strain-Relief Epitaxial Layers 372 9.3.3 Vicinal Surfaces 373 9.4 Surface-Supported Nanostructures Directed by Supramolecular Assemblies 377 9.4.1 Polymerization 377 9.4.1.1 Polymerization of Diacetylenes 377 9.4.1.2 Polymerization by Electrochemical Methods 379 9.4.1.3 Polymerization by Thermal Activation 381 9.4.2 Host-Guest Systems 382 9.4.2.1 Molecular Template with Porous Networks 383 9.4.2.2 SAMs of Functional Molecules 388 9.4.2.3 Two-Dimensional Chira! Template 390 Contents XI 9.5 Summary and Outlook 391 References 392 10 Surface Microstructures and Nanostructures in Natural Systems 401 Taolei Sun and Lei Jiang 10.1 Introduction 401 10.2 Surface Nanostructures and Special Wettability 401 10.2.1 Self-Cleaning Effect on the Lotus Leaf 402 10.2.2 Multifunctional Surfaces of Insect Wings with a Self-Cleaning Effect 405 10.2.3 The Anisotropie Dewetting Properly on Plant Leaves 407 10.2.4 The Super Water-Repellent Force of the Water Strider s Legs 409 10.2.5 Extraordinary Water-Harvesting Ability of the Desert Beetle s Wings 410 10.3 Structure-Related Special Optical Phenomena in Nature 412 10.3.1 Photonic Crystal Structures in Opal and Opal Analogues 412 10.3.2 Structural Colors in Biological Systems 414 10.3.3 The Directional Fluorescence Emission Property in Papilio Butterflies 416 10.3.4 Super Anti-Reflection Structures of Lepidopteran Eyes and Wings 417 10.3.5 Unusual Bright Whiteness in Ultrathin Beetle Scales 418 10.3.6 Photosensitivity in Brittlestar (Ophiuroidea) 419 10.4 The High Adhesive Force of Gecko Foot-Hairs 420 10.5 Summary and Outlook 424 References 424 Index 427
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physical XVII, 439 S. Ill., graph. Darst. 25 cm
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spellingShingle Nanotechnology
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subject_GND (DE-588)4130418-4
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title Nanotechnology
title_auth Nanotechnology
title_exact_search Nanotechnology
title_full Nanotechnology 8 Nanostructured surfaces G. Schmid ... (eds.)
title_fullStr Nanotechnology 8 Nanostructured surfaces G. Schmid ... (eds.)
title_full_unstemmed Nanotechnology 8 Nanostructured surfaces G. Schmid ... (eds.)
title_short Nanotechnology
title_sort nanotechnology nanostructured surfaces
topic Oberflächenstruktur (DE-588)4130418-4 gnd
Nanotechnologie (DE-588)4327470-5 gnd
topic_facet Oberflächenstruktur
Nanotechnologie
url http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016423044&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
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