Nanotechnology 8 Nanostructured surfaces
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020 | |a 9783527317394 |9 978-3-527-31739-4 | ||
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035 | |a (DE-599)BVBBV023237448 | ||
040 | |a DE-604 |b ger |e rakwb | ||
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300 | |a XVII, 439 S. |b Ill., graph. Darst. |c 25 cm | ||
336 | |b txt |2 rdacontent | ||
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Datensatz im Suchindex
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---|---|
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adam_text | Contents
Preface
XIII
List of Contributors XV
Part One
Тор
-Down
Strategy
1
1
Тор
-Down
Fabrication of Nanostructures
3
Ming Liu, Zhuoyuji, and Uwei Shang
1.1
Introduction
3
1.2
lithography
3
1.2.1
Photolithography
4
1.2.1.1
Contact Printing
6
1.2.1.2
Proximity Printing
7
1.2.1.3
Projection Printing
7
1.2.1.4
Resolution Enhancement Techniques (RETs)
7
1.2.1.5
Optical Proximity Correction (OPC)
10
1.2.2
Electron Beam Lithography
11
1.2.3
Х
-Ray Lithography
13
1.2.4
Focused Ion Beam (FIB) Lithography
16
1.2.4.1
Direct-Write
Milling
16
1.2.4.2
Dry Development FIB Lithography
17
1.3
Two-Dimensional Nanostructures: Thin-Film Deposition
17
1.3.1
Fundamentals of Film Growth
18
1.3.2
Physical Vapor Deposition (PVD)
20
1.3.2.1
Vacuum Evaporation
21
1.3.2.2
Molecular Beam Epitaxy (MBE)
23
1.3.2.3
Sputter Deposition
25
1.3.3
Chemical Vapor Deposition (CVD)
27
1.3.3.1
Reaction Kinetics
28
1.3.3.2
Variants of CVD Methods
29
VI
Contents
1.3.3.3
Advantages of CVD
30
1.3.4
Atomic Layer Deposition (ALD)
31
1.3.4.1
ALD Process
31
1.3.4.2
Types of ALD Reaction
32
1.3.4.3
Advantages and Disadvantages
34
1.4
Pattern Transfer
35
1.4.1
Etch
36
1.4.1.1
Wet Etching
36
1.4.1.2
Dry Etching
38
1.4.1.3
A Comparison of Wet and Plasma Etching
42
1.4.2
Lift-Off
Processes
42
References
43
2
Scanning Probe Microscopy as a Tool for the Fabrication
of Structured Surfaces
49
Claudia Haensch, Nicole Herzer, Stephanie Hoeppener,
and
Ulrich S.
Schubert
2.1
Introduction
49
2.2
Structuring with Self-Assembled Monolayers
58
2.2.1
Dip-Pen Nanolithography
58
2.2.1.1
Thermal Dip-Pen Nanolithography
61
2.2.1.2
DPN with Biomolecules
63
2.2.1.3
DPN with Polymers
64
2.2.1.4
DPN with Fluorescent Dyes
65
2.2.1.5
DPN in the Field of Electrolytes
65
2.2.1.6
DPN with Nanomaterials
65
2.2.1.7
Chemical DPN
66
2.3
Structuring of Self-Assembled Monolayers
67
2.3.1
Nanoshaving
67
2.3.2
Nanografting
70
2.3.3
Electro-Oxidative Lithography
73
2.3.3.1
Local Anodic Oxidation
73
2.3.3.2
Chemical Activation of Self-Assembled Monolayers
77
2.3.4
Catalytic Lithography
85
2.4
Surface Chemical Reactions for Structured Surfaces
89
2.4.1
Molecular Overlayers
-
Functionalization
-
Precursors
90
2.4.2
Surface Chemistry
94
2.4.2.1
Substitution
94
2.4.2.2
Click Chemistry
96
2.4.2.3
Esterification/Amidation
97
2.4.2.4 Schiff
Base Reactions
99
2.4.2.5
Formation of Thioureas and Ureas
100
2.4.2.6
Oxidation
100
2.4.2.7
Photochemistry
101
2.4.2.8
Polymer Brashes
102
Contents
VII
2.4.2.9
Others
108
2.4.3
Multífunctíonality
109
2.5
Summary and Outlook 111
References 111
3
Physical, Chemical, and Biological Surface Patterning
by
Microcontact
Printing
125
Jan Mehlich and Bartjan Ravoo
3.1
Introduction
125
3.2
What is
Microcontact
Printing?
126
3.2.1
The Master
126
3.2.2
The Stamp
127
3.3
Inks and Stamps for
Microcontact
Printing
130
3.4
Microcontact
Printing and Soft Lithography
137
3.5
Microcontact
Printing and Biological Arrays
143
3.6
Microcontact
Printing and Surface Chemistry
150
3.7
From Micro to
Nano:
Increasing the Resolution of
Microcontact
Printing
154
3.8
Conclusions and Outlook
158
References
159
4
Advances in Nanoimprint Lithography: 2-D and
3-D
Nanopatterning
of Surfaces by Nanoimoprint Lithography, Morphological
Characterization, and Photonic Applications
165
Vincent Reboud, Timothy Kehoe, Nikolaos Kehagias,
and Clivia M. Sotomayor Torres
4.1
Introduction
165
4.2
Three-Dimensional, Nanoimprint-Based Lithography
166
4.2.1
Background
166
4.2.2
Reverse NIL
170
4.2.3
Reverse-Contact UVNIL
174
4.2.4
The Prospects for
3-D
NIL
175
4.3
Metrology for Nanoimprinting
176
4.3.1
Introduction
176
4.3.2
Scanning Electron Microscopy
177
4.3.3
Atomic Force Microscopy
180
4.3.4
Transmission Electron Microscopy
181
4.3.5
Optical Critical Dimension Metrology. Scatterometry
183
4.3.6
Other Methods
182
4.3.7
Physical Properties
184
4.3.8
Residual Layer Thickness in NIL
185
4.3.9
Towards An Integrated Metrology
186
4.4
Two-Dimensional Nanopatterned Polymer Components
for Photonic Applications
387
4.4.1
Overview on Applications Realized by NIL
187
VIH
Contents
4.4.2
Nanoimprinted
Optical Resonators
188
4.4.2.1
Nanoimprinted Polymeric Band-Edge Lasers
192
A
A3
Patterning in Functionalized Polymers
í
94
4.4.4
Outlook on Nanoimprinted Polymer Devices
197
4.5
Conclusions
198
References
299
Part Two Bottom-Up Strategy
207
5
Anodized Aluminum Oxide
209
Günter
Schmid
5.1
Introduction
209
5.2
Fundamentals of Aluminum Oxide Formation
210
5.2.1
Barrier Oxide Layers
210
5.2.2
Formation of Nanoporous Aluminum Oxide
212
5.2.2.1
Mechanism of Formation
212
5.2.2.2
Chemical Composition
2Î6
5.3
Characterization of Nanoporous Aluminum Oxide Membranes
217
5.3.1
Electron Microscopy
227
5.3.2
Atomic Force Microscopy (AFM)
219
5.4
Aluminum Oxide Membranes as Templates
221
5.4.1
Carbon
Nano
tubes and Nanowires
222
5.4.2
Metal Nanotubes and Nanowires
226
5.4.3
Semiconductor Nanowires
229
5.4.4
Other Materials
231
5.4.5
Nanoparticles
231
5.5
Nanoporous Alumina Membranes as Imprinting Tools
232
5.5.1
Imprinting Techniques and Conditions
233
5.5.2
Imprinting of Metal Surfaces
237
5.5.3
Imprinting of Polymers
240
5.5.4
Special Techniques to Imprint Hard Materials
241
5.6
Properties of Nanoimprinted Polymer Surfaces
242
5.6.1
Optical Properties
242
5.6.2
Wetting Properties
245
5.7
Surfaces with Nanoholes
247
5.8
Summary and Outlook
248
References
249
6
Colloidal Lithography
253
Gang Zhang and Daycmg Wang
6.1
Introduction
253
6.2
Colloidal Crystallization: The Bottom-Up Growth
of Colloidal Masks
254
6.2.1
Sedimentation
254
6.2.2
Vertical Deposition
256
Contents
IX
6.2.3
Spin Coating
257
6.2.4
Colloidal Crystallization at the Water/Air Interface
260
6.3
Top-Down Modification of Colloidal Masks
261
6.3.1
Controlled Deformation
261
6.3.2
Reactive Ion Etching
262
6.4
Colloidal lithography
264
6.4.1
Colloidal Mask-Assisted Etching
264
6.4.2
Colloidal Mask-Assisted Chemical Deposition
265
6.4.3
Colloidal Mask-Assisted Physical Deposition: Nanosphere
Lithography
268
6.4.3.1
Surface Patterning on Planar Substrates
269
6.4.3.2
Surface Patterning on Particles
274
6.4.3.3
Extension of Nanosphere Lithography
278
6.5
Applications of CL
280
6.6
Summary
284
References
285
7
Diblock Copolymer Micelle Nanolithography:
Characteristics and Applications
291
Theobald Lohmueller and Joachim P.
Spatz
7.1
Introduction
291
7.2
Block Copolymer Micelle Nanolithography
293
7.2.1
Introduction
293
7.2.2
Characterization on Nanoparticle Arrays
295
7.2.2.1
Scanning Electron Microscopy
(SEM) 295
7.2.2.2
Atomic Force Microscopy (AFM)
295
7.2.2.3
Spacing and Order of Nanoparticle Arrays
296
7.2.3
Tuning the Pattern Properties
297
7.2.3.1
Controlling the Nanoparticle Spacing
297
7.2.3.2
Controlling the Particle Size
300
7.2.3.3
Micro-Nanopatterned Interfaces
303
7.3
Applications of Nanopatterned Materials
305
7.3.1
Moth Eye Antireflective Surfaces
305
7.3.2
Cells on Nanostructured Interfaces
309
7.4
Conclusions
311
References
313
8
The Evolution of Langmuir-Blodgett Patterning
317
Xiaodong Chen and Lifeng Chi
8.1
Introduction
317
8.2
The LB Technique in Retrospect: From Homogeneous
Film to Lateral Features
318
8.3
LB Patterning of Organic Molecules
319
8.3.1
Direct Transfer of Featured Structures Onto Solid Substrates
319
8.3.2
Pattern Formation During LB Transfer
324
X
Contents
8.4
LB
Patterning of Nanomaterials
327
8.4.1
LB
Patterning of Nanoparticles
328
8.4.2
LB Patterning of Nanowires
332
8.5
Application of Structures Formed by LB Patterning
335
8.5.1
Templated Self-Assembly of Molecules and Nanoparticles
335
8.5.2
Pattern Transfer From Chemical to Topographic Patterns
338
8.5.3
Integration of Nanomaterial Patterning in Nanodevice
Fabrication
341
8.6
Conclusions and Outlook
343
References
345
9
Surface-Supported Nanostructures Directed by Atomic-
and Molecular-Level Templates
349
Dingyong Zhong, Haiming Than,
ana üfeng
Chi
9.1
Introduction
349
9.2
Atomic- and Molecular-Level Templates on Surfaces
350
9.2.1
Surface Reconstructions and Reconstruction-Related Patterns
351
9.2.1.1
Si(lll)-7
x
7 351
9.2.1.2
Au(lll)-22
χ
^З
and the Herringbone Pattern
351
9.2.1.3
Cu(110)-(2
χ
1)O and the Stripe Pattern
352
9.2.2
Strain-Relief Epitaxial Layers
352
9.2.2.1
Boron Nitride Nanomesh
353
9.2.2.2
Ag/Pt(lll)
354
9.2.3
Vicinal Surfaces
355
9.2.3.1
Vicinal Au(lll) Surfaces
355
9.2.4
Surface-Supported Organic Supramolecular Assemblies
357
9.2.4.1
Preparation Techniques
357
9.2.4.2
0-D and 1-D Nanostructures
358
9.2.4.3
2-D Molecular Patterns
360
9.2.4.4
Porous Networks
368
9.3
Surface-Supported Nanostructures Directed by Atomic-Level
Inorganic Templates
369
9.3.1
Reconstruction
369
9.3.2
Strain-Relief Epitaxial Layers
372
9.3.3
Vicinal Surfaces
373
9.4
Surface-Supported Nanostructures Directed by Supramolecular
Assemblies
377
9.4.1
Polymerization
377
9.4.1.1
Polymerization of Diacetylenes
377
9.4.1.2
Polymerization by Electrochemical Methods
379
9.4.1.3
Polymerization by Thermal Activation
381
9.4.2
Host-Guest Systems
382
9.4.2.1
Molecular Template with Porous Networks
383
9.4.2.2
SAMs of Functional Molecules
388
9.4.2.3
Two-Dimensional
Chira!
Template
390
Contents
XI
9.5
Summary and Outlook
391
References
392
10
Surface Microstructures
and Nanostructures in Natural Systems
401
Taolei Sun and Lei Jiang
10.1
Introduction
401
10.2
Surface Nanostructures and Special Wettability
401
10.2.1
Self-Cleaning Effect on the Lotus Leaf
402
10.2.2
Multifunctional Surfaces of Insect Wings with a
Self-Cleaning Effect
405
10.2.3
The
Anisotropie
Dewetting Properly on Plant Leaves
407
10.2.4
The Super Water-Repellent Force of the Water Strider s Legs
409
10.2.5
Extraordinary Water-Harvesting Ability of the Desert
Beetle s Wings
410
10.3
Structure-Related Special Optical Phenomena in Nature
412
10.3.1
Photonic Crystal Structures in Opal and Opal Analogues
412
10.3.2
Structural Colors in Biological Systems
414
10.3.3
The Directional Fluorescence Emission Property in Papilio
Butterflies
416
10.3.4
Super Anti-Reflection Structures of Lepidopteran Eyes and Wings
417
10.3.5
Unusual Bright Whiteness in Ultrathin Beetle Scales
418
10.3.6
Photosensitivity in Brittlestar (Ophiuroidea)
419
10.4
The High Adhesive Force of Gecko Foot-Hairs
420
10.5
Summary and Outlook
424
References
424
Index
427
|
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bvnumber | BV023237448 |
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id | DE-604.BV023237448 |
illustrated | Illustrated |
indexdate | 2024-12-23T20:58:36Z |
institution | BVB |
isbn | 9783527317394 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016423044 |
oclc_num | 635250228 |
open_access_boolean | |
owner | DE-355 DE-BY-UBR DE-20 DE-29T DE-703 DE-92 DE-83 DE-11 DE-210 DE-1102 |
owner_facet | DE-355 DE-BY-UBR DE-20 DE-29T DE-703 DE-92 DE-83 DE-11 DE-210 DE-1102 |
physical | XVII, 439 S. Ill., graph. Darst. 25 cm |
publishDate | 2010 |
publishDateSearch | 2010 |
publishDateSort | 2010 |
publisher | Wiley-VCH |
record_format | marc |
spellingShingle | Nanotechnology Oberflächenstruktur (DE-588)4130418-4 gnd Nanotechnologie (DE-588)4327470-5 gnd |
subject_GND | (DE-588)4130418-4 (DE-588)4327470-5 |
title | Nanotechnology |
title_auth | Nanotechnology |
title_exact_search | Nanotechnology |
title_full | Nanotechnology 8 Nanostructured surfaces G. Schmid ... (eds.) |
title_fullStr | Nanotechnology 8 Nanostructured surfaces G. Schmid ... (eds.) |
title_full_unstemmed | Nanotechnology 8 Nanostructured surfaces G. Schmid ... (eds.) |
title_short | Nanotechnology |
title_sort | nanotechnology nanostructured surfaces |
topic | Oberflächenstruktur (DE-588)4130418-4 gnd Nanotechnologie (DE-588)4327470-5 gnd |
topic_facet | Oberflächenstruktur Nanotechnologie |
url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016423044&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
volume_link | (DE-604)BV023237305 |
work_keys_str_mv | AT chilifeng nanotechnology8 AT schmidgunter nanotechnology8 |