Nano- and micromaterials

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Weitere Verfasser: Ohno, Kaoru 1955- (HerausgeberIn)
Format: Buch
Sprache:English
Veröffentlicht: Berlin [u.a.] Springer 2008
Schriftenreihe:Advances in materials research 9
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Datensatz im Suchindex

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adam_text GESCANNT DURCH CONTENTS 1 GENERAL INTRODUCTION K. OHNO 1 REFERENCES 15 2 NANOMETER-SCALE STRUCTURE FORMATION ON SOLID SURFACES M. TANAKA, K. SHUDO, AND S. OHNO 19 2.1 INTRODUCTION 19 2.2 ATOMIC LAYER ETCHING PROCESSES ON SILICON SURFACES 21 2.2.1 INTRODUCTION 21 2.2.2 REAL-TIME OPTICAL MEASUREMENTS 24 2.2.3 ADSORPTION OF HALOGEN ATOMS: STICKING COEFFICIENT AND POTENTIAL BARRIER 2C 2.2.4 SITE-SELECTIVE ADSORPTION 34 2.2.5 DESORPTION OF SILICON HALIDES AND RESTORATION OF THE DAS STRUCTURE 39 2.2.6 SUMMARY 48 2.3 NANOSCALE FABRICATION PROCESSES OF SILICON SURFACES WITH HALOGENS . 50 2.3.1 INTRODUCTION 50 2.3.2 SCANNING TUNNELING MICROSCOPY 53 2.3.3 THERMAL DESORPTION PROCESS 56 2.3.4 CLUSTER ALIGNMENT BY PASSIVE FABRICATION 62 2.3.5 ACTIVE FABRICATION 68 2.3.6 SUMMARY 76 2.4 SELF-ORGANIZED NANOPATTERN FORMATION ON COPPER SURFACES 77 2.4.1 INTRODUCTION 77 2.4.2 EXPERIMENTS 78 2.4.3 NOVEL PHENOMENA ON CU(001)-C(2X2)N 79 2.4.4 NANOPATTERN FORMATION AT VICINAL SURFACES 79 2.4.5 STRAIN-DEPENDENT NUCLEATION OF METAL ISLANDS 82 2.4.6 STRAIN-DEPENDENT DISSOCIATION OF OXYGEN MOLECULES 85 2.4.7 SUMMARY 88 REFERENCES 89 BIBLIOGRAFISCHE INFORMATIONEN HTTP://D-NB.INFO/985165502 DIGITALISIERT DURCH * * * * * * * * * * * * * * * * 329 XII CONTENTS 12.1.2 ASSEMBLY-FREE, SINGLE-STEP FABRICATION PROCESS OF MOVABLE MICROPARTS 293 12.2 OPTICALLY DRIVEN MICROMACHINES 296 12.2.1 OPTICAL TRAPPING 296 12.2.2 OPTICAL DRIVING METHOD OF MULTIPLE MICROMACHINES 298 12.2.3 OPTIMIZATION OF TIME-DIVIDED LASER SCANNING 300 12.2.4 COOPERATIVE CONTROL OF MICROMANIPULATORS 302 12.2.5 OPTICALLY DRIVEN MICROPUMP 303 12.2.6 CONCEPT OF ALL-OPTICALLY CONTROLLED BIOCHIP 307 12.3 CONCLUSION AND FUTURE PROSPECT 307 REFERENCES 308 13 STUDY OF COMPLEX PLASMAS M. SHINDO AND O. ISHIHARA 311 13.1 OVERVIEW OF COMPLEX PLASMA RESEARCH 311 13.2 CHARGING OF A DUST PARTICLE IN A PLASMA 312 13.3 MEASUREMENTS OF THE CHARGE OF DUST PARTICLES LEVITATING IN ELECTRON BEAM PLASMA [12] 313 13.4 VARIOUS APPROACHES TO PLASMA-AIDED DESIGN OF MICROPARTICLES SYSTEM IN ION FLOW 315 13.4.1 ANALYSIS OF ION TRAJECTORIES AROUND A DUST PARTICLE IN ION FLOW [17] 316 13.4.2 WAKE POTENTIAL FORMATION TO BIND DUST PARTICLES ALIGNED ALONG ION FLOW 318 13.4.3 ATTRACTIVE FORCE BETWEEN DUST PARTICLES ALIGNED PERPENDICULAR TO ION FLOW [30] 320 13.5 SIMULATION STUDY OF CLUSTER DESIGN OF CHARGED DUST PARTICLES 321 13.6 COMPLEX PLASMA EXPERIMENT IN CRYOGENIC ENVIRONMENT [38] 323 13.7 SUMMARY 325 REFERENCES 326 INDEX
any_adam_object 1
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Physik
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physical XV, 337 S. Ill., graph. Darst.
publishDate 2008
publishDateSearch 2008
publishDateSort 2008
publisher Springer
record_format marc
series Advances in materials research
series2 Advances in materials research
spellingShingle Nano- and micromaterials
Advances in materials research
Nanostructured materials
Nanostructures
Nanostrukturiertes Material (DE-588)4342626-8 gnd
Nanotechnologie (DE-588)4327470-5 gnd
subject_GND (DE-588)4342626-8
(DE-588)4327470-5
(DE-588)4143413-4
title Nano- and micromaterials
title_auth Nano- and micromaterials
title_exact_search Nano- and micromaterials
title_full Nano- and micromaterials Kaoru Ohno ... (eds.)
title_fullStr Nano- and micromaterials Kaoru Ohno ... (eds.)
title_full_unstemmed Nano- and micromaterials Kaoru Ohno ... (eds.)
title_short Nano- and micromaterials
title_sort nano and micromaterials
topic Nanostructured materials
Nanostructures
Nanostrukturiertes Material (DE-588)4342626-8 gnd
Nanotechnologie (DE-588)4327470-5 gnd
topic_facet Nanostructured materials
Nanostructures
Nanostrukturiertes Material
Nanotechnologie
Aufsatzsammlung
url http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016293210&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
volume_link (DE-604)BV012271346
work_keys_str_mv AT ohnokaoru nanoandmicromaterials