Electrical and electromechanical properties of ferroelectric thin films
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| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Aachen
Shaker
2007
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| Schriftenreihe: | Berichte aus der Halbleitertechnik
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| Online-Zugang: | Inhaltsverzeichnis |
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| 245 | 1 | 0 | |a Electrical and electromechanical properties of ferroelectric thin films |c Peter Gerber |
| 264 | 1 | |a Aachen |b Shaker |c 2007 | |
| 300 | |a X, 114 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
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| 490 | 0 | |a Berichte aus der Halbleitertechnik | |
| 500 | |a Zugl.: Aachen, Techn. Hochsch., Diss., 2007 | ||
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Datensatz im Suchindex
| DE-BY-TUM_call_number | 0001 2007 A 8868 |
|---|---|
| DE-BY-TUM_katkey | 1611727 |
| DE-BY-TUM_location | Mag |
| DE-BY-TUM_media_number | 040006652326 |
| _version_ | 1820864781884588032 |
| adam_text | BERICHTE AUS DER HALBLEITERTECHNIK PETER GERBER ELECTRICAL AND
ELECTROMECHANICAL PROPERTIES OF FERROELECTRIC THIN FILMS D 82 (DISS.
RWTH AACHEN) SHAKER VERLAG AACHEN 2007 CONTENTS 1 INTRODUCTION 1 1.1
MOTIVATION 1 1.2 STATE OF THE ART 2 1.3 OBJECTIVES 5 2 FERROELECTRIC
MATERIALS AND THEIR PROPERTIES 7 2.1 FERROELECTRIC MATERIALS - A
DEFINITION 7 2.2 LEAD TITANATE ZIRCONATE 8 2.3 ELECTRICAL PROPERTIES 10
2.4 ELECTROMECHANICAL PROPERTIES 11 2.5 DOMAIN WALLS 13 2.6
SWITCHING-POLARIZATION REVERSAL 15 2.7 REVERSIBLE AND IRREVERSIBLE
PROCESSES 16 2.8 FAILURE MECHANISMS 18 3 EXPERIMENTAL METHODS 20 3.1
SAMPLE PREPARATION 20 3.1.1 LEAD TITANATE ZIRCONATE THIN FILMS 21 3.2
INTERFACE DAMAGING BY ETCHING 22 3.3 PHYSICAL CHARACTERIZATION METHODS
23 3.3.1 X-RAY DIFFRACTION 23 3.3.2 SCANNING ELECTRON MICROSCOPY 24
3.3.3 PROFILOMETRY 25 3.4 ELECTRICAL CHARACTERIZATION METHODS 25 3.4.1
LARGE-SIGNAL HYSTERESIS P 26 3.4.2 SMALL-SIGNAL CAPACITANCE C 27 3.5
ELECTROMECHANICAL CHARACTERIZATION METHODS 30 3.5.1 DOUBLE-BEAM LASER
INTERFEROMETER (DBLI) 31 OPTICAL COMPONENTS: 33 VI BEAM PATH: 37 3.5.2
LARGE-SIGNAL STRAIN S 38 3.5.3 SMALL-SIGNAL PIEZOELECTRIC ^33 AND
ELECTROSTRICTIVE M 33 COEFFICIENTS . . 39 4 RESULTS AND DISCUSSION 41
4.1 INTERFACE DAMAGE 41 4.1.1 WET ETCHING 41 4.1.2 DRY ETCHING 43 AR
ETCHING: 44 CL 2 ETCHING: 44 AR/CF 4 ETCHING: 47 EKC STRIPPING: 49 4.2
GEOMETRIC EFFECTS 51 4.2.1 MEASUREMENT RESULTS 51 4.2.2 METHODICAL
INVESTIGATION .- 55 4.2.3 NUMERICAL SIMULATION 57 4.3 FERROELECTRIC
SWITCHING FATIGUE 61 4.4 SMALL-SIGNAL INFLUENCES 66 4.4.1 MEASUREMENT
RESULTS 66 4.4.2 THEORETIC DISCUSSION 69 ELECTROSTRICTIVE BEHAVIOR: 69
DECREASE OF E C : 72 FURTHER IMPACTS OF SWITCHING: 73 4.5 ANALYTICAL
MODELING 75 4.5.1 MEASUREMENT RESULTS 76 4.5.2 MODELING OF THE LARGE
SIGNAL STRAIN 80 4.5.3 DISCUSSION 83 4.6 COMPOSITION INFLUENCES *T 85
4.6.1 MEASUREMENT RESULTS 86 STRUCTURAL ANALYSIS: 87 VN ELECTRICAL
BEHAVIOR: 88 ELECTROMECHANICAL BEHAVIOR: 91 4.6.2 MODELING OF THE
LARGE-SIGNAL BEHAVIOR 94 ELECTRICAL BEHAVIOR: 94 ELECTROMECHANICAL
BEHAVIOR: 96 4.6.3 APPLICATION SUITABILITY 98 5 CONCLUSIONS 101 5.1
SUMMARY 101 5.2 OUTLOOK 103 REFERENCES 104
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| any_adam_object | 1 |
| author | Gerber, Peter 1975- |
| author_GND | (DE-588)13286620X |
| author_facet | Gerber, Peter 1975- |
| author_role | aut |
| author_sort | Gerber, Peter 1975- |
| author_variant | p g pg |
| building | Verbundindex |
| bvnumber | BV022943286 |
| ctrlnum | (OCoLC)180742152 (DE-599)BVBBV022943286 |
| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV022943286 |
| illustrated | Illustrated |
| indexdate | 2024-12-23T20:42:29Z |
| institution | BVB |
| isbn | 3832256261 9783832256265 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016147900 |
| oclc_num | 180742152 |
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| owner_facet | DE-91 DE-BY-TUM |
| physical | X, 114 S. Ill., graph. Darst. |
| publishDate | 2007 |
| publishDateSearch | 2007 |
| publishDateSort | 2007 |
| publisher | Shaker |
| record_format | marc |
| series2 | Berichte aus der Halbleitertechnik |
| spellingShingle | Gerber, Peter 1975- Electrical and electromechanical properties of ferroelectric thin films Dünne Schicht swd Ferroelektrikum swd PZT swd Stoffeigenschaft swd System-in-Package swd Ätzen swd |
| subject_GND | (DE-588)4113937-9 |
| title | Electrical and electromechanical properties of ferroelectric thin films |
| title_auth | Electrical and electromechanical properties of ferroelectric thin films |
| title_exact_search | Electrical and electromechanical properties of ferroelectric thin films |
| title_full | Electrical and electromechanical properties of ferroelectric thin films Peter Gerber |
| title_fullStr | Electrical and electromechanical properties of ferroelectric thin films Peter Gerber |
| title_full_unstemmed | Electrical and electromechanical properties of ferroelectric thin films Peter Gerber |
| title_short | Electrical and electromechanical properties of ferroelectric thin films |
| title_sort | electrical and electromechanical properties of ferroelectric thin films |
| topic | Dünne Schicht swd Ferroelektrikum swd PZT swd Stoffeigenschaft swd System-in-Package swd Ätzen swd |
| topic_facet | Dünne Schicht Ferroelektrikum PZT Stoffeigenschaft System-in-Package Ätzen Hochschulschrift |
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