An industrial CMOS process family for integrated silicon sensors
Gespeichert in:
| 1. Verfasser: | |
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| Format: | Mikrofilm Buch |
| Sprache: | English |
| Veröffentlicht: |
1999
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| Ausgabe: | [Mikrofiche-Ausg.] |
| Schriftenreihe: | ETH-Diss
13463 |
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| 100 | 1 | |a Mueller, Thomas |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a An industrial CMOS process family for integrated silicon sensors |c presented by Thomas Müller |
| 250 | |a [Mikrofiche-Ausg.] | ||
| 264 | 1 | |c 1999 | |
| 300 | |a II, 125 S. |b Ill., graph. Darst. | ||
| 337 | |b h |2 rdamedia | ||
| 338 | |b he |2 rdacarrier | ||
| 490 | 1 | |a ETH-Diss |v 13463 | |
| 500 | |a Zürich, Techn. Hochsch., Diss., 1999. -Zsfassung in dt. Sprache. -Mikrofiche-Ausg.: 2 Mikrofiches | ||
| 650 | 0 | 7 | |a CMOS |0 (DE-588)4010319-5 |2 gnd |9 rswk-swf |
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| 650 | 0 | 7 | |a Siliciumbauelement |0 (DE-588)4181368-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ätzen |0 (DE-588)4000648-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nassätzen |0 (DE-588)4332374-1 |2 gnd |9 rswk-swf |
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| 883 | 1 | |8 2\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-015283190 | |
Datensatz im Suchindex
| _version_ | 1819262101127954432 |
|---|---|
| any_adam_object | |
| author | Mueller, Thomas |
| author_facet | Mueller, Thomas |
| author_role | aut |
| author_sort | Mueller, Thomas |
| author_variant | t m tm |
| building | Verbundindex |
| bvnumber | BV022068415 |
| ctrlnum | (OCoLC)632997390 (DE-599)BVBBV022068415 |
| edition | [Mikrofiche-Ausg.] |
| format | Microfilm Book |
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| genre | 1\p (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV022068415 |
| illustrated | Illustrated |
| indexdate | 2024-12-23T19:52:20Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015283190 |
| oclc_num | 632997390 |
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| owner | DE-706 |
| owner_facet | DE-706 |
| physical | II, 125 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| record_format | marc |
| series | ETH-Diss |
| series2 | ETH-Diss |
| spelling | Mueller, Thomas Verfasser aut An industrial CMOS process family for integrated silicon sensors presented by Thomas Müller [Mikrofiche-Ausg.] 1999 II, 125 S. Ill., graph. Darst. h rdamedia he rdacarrier ETH-Diss 13463 Zürich, Techn. Hochsch., Diss., 1999. -Zsfassung in dt. Sprache. -Mikrofiche-Ausg.: 2 Mikrofiches CMOS (DE-588)4010319-5 gnd rswk-swf Siliciumsensor (DE-588)4193160-9 gnd rswk-swf Sensor (DE-588)4038824-4 gnd rswk-swf Integrierter Sensor (DE-588)4235815-2 gnd rswk-swf Siliciumbauelement (DE-588)4181368-6 gnd rswk-swf Ätzen (DE-588)4000648-7 gnd rswk-swf Nassätzen (DE-588)4332374-1 gnd rswk-swf CMOS-Schaltung (DE-588)4148111-2 gnd rswk-swf 1\p (DE-588)4113937-9 Hochschulschrift gnd-content Ätzen (DE-588)4000648-7 s DE-604 Sensor (DE-588)4038824-4 s CMOS-Schaltung (DE-588)4148111-2 s Siliciumbauelement (DE-588)4181368-6 s Integrierter Sensor (DE-588)4235815-2 s Siliciumsensor (DE-588)4193160-9 s CMOS (DE-588)4010319-5 s Nassätzen (DE-588)4332374-1 s 2\p DE-604 ETH-Diss 13463 (DE-604)BV021854884 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Mueller, Thomas An industrial CMOS process family for integrated silicon sensors ETH-Diss CMOS (DE-588)4010319-5 gnd Siliciumsensor (DE-588)4193160-9 gnd Sensor (DE-588)4038824-4 gnd Integrierter Sensor (DE-588)4235815-2 gnd Siliciumbauelement (DE-588)4181368-6 gnd Ätzen (DE-588)4000648-7 gnd Nassätzen (DE-588)4332374-1 gnd CMOS-Schaltung (DE-588)4148111-2 gnd |
| subject_GND | (DE-588)4010319-5 (DE-588)4193160-9 (DE-588)4038824-4 (DE-588)4235815-2 (DE-588)4181368-6 (DE-588)4000648-7 (DE-588)4332374-1 (DE-588)4148111-2 (DE-588)4113937-9 |
| title | An industrial CMOS process family for integrated silicon sensors |
| title_auth | An industrial CMOS process family for integrated silicon sensors |
| title_exact_search | An industrial CMOS process family for integrated silicon sensors |
| title_full | An industrial CMOS process family for integrated silicon sensors presented by Thomas Müller |
| title_fullStr | An industrial CMOS process family for integrated silicon sensors presented by Thomas Müller |
| title_full_unstemmed | An industrial CMOS process family for integrated silicon sensors presented by Thomas Müller |
| title_short | An industrial CMOS process family for integrated silicon sensors |
| title_sort | an industrial cmos process family for integrated silicon sensors |
| topic | CMOS (DE-588)4010319-5 gnd Siliciumsensor (DE-588)4193160-9 gnd Sensor (DE-588)4038824-4 gnd Integrierter Sensor (DE-588)4235815-2 gnd Siliciumbauelement (DE-588)4181368-6 gnd Ätzen (DE-588)4000648-7 gnd Nassätzen (DE-588)4332374-1 gnd CMOS-Schaltung (DE-588)4148111-2 gnd |
| topic_facet | CMOS Siliciumsensor Sensor Integrierter Sensor Siliciumbauelement Ätzen Nassätzen CMOS-Schaltung Hochschulschrift |
| volume_link | (DE-604)BV021854884 |
| work_keys_str_mv | AT muellerthomas anindustrialcmosprocessfamilyforintegratedsiliconsensors |