X-ray metrology in semiconductor manufacturing
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| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Boca Raton
CRC/Taylor & Francis
2006
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Datensatz im Suchindex
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| indexdate | 2024-12-23T19:31:34Z |
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| language | English |
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| spelling | X-ray metrology in semiconductor manufacturing D. Keith Bowen ... Boca Raton CRC/Taylor & Francis 2006 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Semiconductors Design and construction Quality control Integrated circuits Measurement Semiconductor wafers Inspection X-rays Diffraction Fluroscopy Röntgenstrahlung (DE-588)4129728-3 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Messtechnik (DE-588)4114575-6 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s Röntgenstrahlung (DE-588)4129728-3 s Messtechnik (DE-588)4114575-6 s DE-604 Halbleiter (DE-588)4022993-2 s Fertigung (DE-588)4016899-2 s Bowen, David Keith 1940- Sonstige (DE-588)13163156X oth |
| spellingShingle | X-ray metrology in semiconductor manufacturing Semiconductors Design and construction Quality control Integrated circuits Measurement Semiconductor wafers Inspection X-rays Diffraction Fluroscopy Röntgenstrahlung (DE-588)4129728-3 gnd Halbleiter (DE-588)4022993-2 gnd Fertigung (DE-588)4016899-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Messtechnik (DE-588)4114575-6 gnd |
| subject_GND | (DE-588)4129728-3 (DE-588)4022993-2 (DE-588)4016899-2 (DE-588)4158814-9 (DE-588)4114575-6 |
| title | X-ray metrology in semiconductor manufacturing |
| title_auth | X-ray metrology in semiconductor manufacturing |
| title_exact_search | X-ray metrology in semiconductor manufacturing |
| title_full | X-ray metrology in semiconductor manufacturing D. Keith Bowen ... |
| title_fullStr | X-ray metrology in semiconductor manufacturing D. Keith Bowen ... |
| title_full_unstemmed | X-ray metrology in semiconductor manufacturing D. Keith Bowen ... |
| title_short | X-ray metrology in semiconductor manufacturing |
| title_sort | x ray metrology in semiconductor manufacturing |
| topic | Semiconductors Design and construction Quality control Integrated circuits Measurement Semiconductor wafers Inspection X-rays Diffraction Fluroscopy Röntgenstrahlung (DE-588)4129728-3 gnd Halbleiter (DE-588)4022993-2 gnd Fertigung (DE-588)4016899-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Messtechnik (DE-588)4114575-6 gnd |
| topic_facet | Semiconductors Design and construction Quality control Integrated circuits Measurement Semiconductor wafers Inspection X-rays Diffraction Fluroscopy Röntgenstrahlung Halbleiter Fertigung Halbleitertechnologie Messtechnik |
| work_keys_str_mv | AT bowendavidkeith xraymetrologyinsemiconductormanufacturing |