MEMS, design and fabrication
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Boca Raton, Fla.
Taylor & Francis
2006
|
| Schriftenreihe: | The MEMS handbook
[2] |
| Schlagworte: | |
| Tags: |
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| discipline | Technik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV021647399 |
| illustrated | Illustrated |
| indexdate | 2024-12-23T19:27:34Z |
| institution | BVB |
| isbn | 0849391385 9780849391385 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-014862096 |
| oclc_num | 60543318 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | getr. Zählung Ill. |
| publishDate | 2006 |
| publishDateSearch | 2006 |
| publishDateSort | 2006 |
| publisher | Taylor & Francis |
| record_format | marc |
| series | The MEMS handbook |
| series2 | The MEMS handbook Mechanical engineering series |
| spellingShingle | MEMS, design and fabrication The MEMS handbook Microelectromechanical systems Design and construction Microfabrication |
| title | MEMS, design and fabrication |
| title_auth | MEMS, design and fabrication |
| title_exact_search | MEMS, design and fabrication |
| title_full | MEMS, design and fabrication ed. by Mohamed Gad-el-Hak |
| title_fullStr | MEMS, design and fabrication ed. by Mohamed Gad-el-Hak |
| title_full_unstemmed | MEMS, design and fabrication ed. by Mohamed Gad-el-Hak |
| title_short | MEMS, design and fabrication |
| title_sort | mems design and fabrication |
| topic | Microelectromechanical systems Design and construction Microfabrication |
| topic_facet | Microelectromechanical systems Design and construction Microfabrication |
| volume_link | (DE-604)BV021647348 |
| work_keys_str_mv | AT gadelhakmohamed memsdesignandfabrication |