Thin film analysis by X-ray scattering
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| Format: | Buch |
| Sprache: | English |
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Weinheim
WILEY-VCH
2006
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| 245 | 1 | 0 | |a Thin film analysis by X-ray scattering |c Mario Birkholz |
| 264 | 1 | |a Weinheim |b WILEY-VCH |c 2006 | |
| 300 | |a XXII, 356 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Thin films | |
| 650 | 4 | |a X-ray spectroscopy | |
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Datensatz im Suchindex
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|---|---|
| adam_text | |v
Table of Contents
Preface IX
Symbols XV
1 Principles of X ray Diffraction 1
1.1 The Basic Phenomenon 1
1.2 The 0/20 Scan 11
1.3 Intensity of Bragg Reflections 14
1.3.1 Atomic Form Factors 27
1.3.2 Structure Factor 19
1.3.3 Multiplicity 24
1.3.4 Geometry Factor 25
1.3.5 Preferred Orientation (Texture) 25
1.3.6 Polarization Factor 26
1.3.7 Absorption Factor 26
1.3.8 Integration of the Interference Function 29
1.4 Applications 37
Exercises 39
References 41
2 Identification of Chemical Phases 43
2.1 Histogram Based Techniques 43
2.2 Linear Attenuation Coefficient p 55
2.3 Determination and Interpretation of the pt Product 60
2.4 Analysis of Phase Mixtures 66
2.5 Amorphous Thin Films 70
2.6 Accurate Determination of Lattice Parameter 74
2.7 Applications 80
Exercises 81
References 83
Thin Film Analysis by X Ray Scattering. M. Birkholz
Copyright © 2006 WILEY VCH Verlag GmbH Co. KGaA, Weinheim
ISBN: 3 527 31052 5
VI I Table of Contents
3 Line Profile Analysis 85
3.1 Model Functions and Peak Parameters 86
3.2 Instrumental Line Profile 97
3.3 Deconvolution by Fourier Techniques 101
3.4 Reflection Broadening by Small Crystallite Size Only 107
3.4.1 Scherrer Equation 108
3.4.2 Column Height Distribution 111
3.4.3 Crystallite Shapes Other Than Cubes 112
3.4.4 Determination of the Column Height Distribution Function 315
3.4.5 Determination of the Crystallite Size Distribution Function 118
3.5 Concomitant Occurrence of Size and Strain Broadening 120
3.5.1 Analysis According to Williamson and Hall 122
3.5.2 Method of Warren and Averbach 226
3.5.3 Single Line Analysis 129
3.5.4 Techniques of Whole Pattern Fitting 130
3.6 Applications 134
Exercises 136
References 138
4 Crazing Incidence Configurations 143
4.1 Grazing Incidence X ray Diffraction (GIXRD) 148
4.2 Penetration Depth and Information Depth 155
4.3 Depth Dependent Properties 258
4.4 Refractive Index for X rays 260
4.5 Total External Reflection and Critical Angle 262
4.6 X ray Reflectivity (XRR) 265
4.6.1 Reflectivity of a Substrate 266
4.6.2 Reflectivity of a Single Layer 268
4.6.3 Reflectivity of Multilayers and Superlattices 272
4.7 Grazing Incidence Diffraction (GID) 275
4.8 Applications 277
Exercises 279
References 282
5 Texture and Preferred Orientation 283
5.1 Texture Factors 188
5.2 Pole Figures 392
5.3 Measurement of Pole Figures 295
5.4 Directions, Orientations and Inverse Pole Figures 200
5.5 Fiber Textures or Layer Textures 204
5.5.1 Harmonic Method 204
5.5.2 Whole Pattern Techniques 207
5.5.3 Rocking Curves (to Scans) 222
5.6 Biaxial and Fully General Textures 226
5.6.1 Azimuthal Scans ( |) Scans) 228
5.6.2 General Orientation Distribution 220
Table of Contents VII
5.6.3 Determination of Fully General Texture 225
5.7 Depth Dependence of Thin Film Textures 228
5.8 Applications 230
Exercises 234
References 235
6 Residual Stress Analysis 239
Mario Birkholz and Christoph Genzel
6.1 Ceiiinnosssttuv 241
6.2 Fundamental Equation of XSA 246
6.3 Measurement of dv Distributions 249
6.4 Diffraction Elastic Constants (DECs) Sj and l/2s2 258
6.5 Grain Interaction Models 262
6.6 The Effect of Texture 265
6.7 Classification of Stresses 268
6.7.1 Classification by Dimension 268
6.7.2 Residual Stresses in Multiphase Materials 269
6.7.3 Origin of Residual Stresses: Extrinsic and Intrinsic Stresses 271
6.8 Effect of Residual Stress Gradients 273
6.8.1 General Considerations 273
6.8.2 The Biaxial Stress State 274
6.9 Detection of Residual Stress Gradients in Thin Films 276
6.9.1 Basic Relations 276
6.9.2 X ray Penetration Depth for the General Case of
Asymmetric Diffraction 278
6.9.3 Special Methods for X ray Stress Gradient Analysis 281
6.9.4 Grazing Incidence Diffraction (GID) 282
6.9.5 The Scattering Vector Method 284
6.9.6 Realization of H Mode on a Four Circle Diffractometer 286
6.10 Applications 289
Exercises 291
References 291
7 High Resolution X ray Diffraction 297
Mario Birkholz and Paul F. Fewster
7.1 Strain, Strain Relaxation and Composition in Epitaxial Layers 303
7.2 High Resolution Rocking Curves 306
7.3 Mosaicity and Extinction 324
7.4 Dynamical Theory of Ewald and Extensions 319
7.5 High Resolution Rocking Curves and Profiles from
Layer Structures 324
7.6 Reciprocal Space Mapping 332
7.7 Diffuse Scattering 337
7.8 Extensions to High Resolution Diffraction 338
Exercises 339
References 340
|
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| ctrlnum | (OCoLC)62470788 (DE-599)BVBBV019991280 |
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| dewey-ones | 530 - Physics |
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| id | DE-604.BV019991280 |
| illustrated | Illustrated |
| indexdate | 2024-12-23T18:20:42Z |
| institution | BVB |
| isbn | 9783527310524 3527310525 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-013313193 |
| oclc_num | 62470788 |
| open_access_boolean | |
| owner | DE-20 DE-703 DE-29T DE-522 DE-526 DE-188 |
| owner_facet | DE-20 DE-703 DE-29T DE-522 DE-526 DE-188 |
| physical | XXII, 356 S. Ill., graph. Darst. |
| publishDate | 2006 |
| publishDateSearch | 2006 |
| publishDateSort | 2006 |
| publisher | WILEY-VCH |
| record_format | marc |
| spellingShingle | Birkholz, Mario Thin film analysis by X-ray scattering Thin films X-ray spectroscopy Röntgenstrukturanalyse (DE-588)4137203-7 gnd Röntgenstreuung (DE-588)4178324-4 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4137203-7 (DE-588)4178324-4 (DE-588)4136925-7 |
| title | Thin film analysis by X-ray scattering |
| title_auth | Thin film analysis by X-ray scattering |
| title_exact_search | Thin film analysis by X-ray scattering |
| title_full | Thin film analysis by X-ray scattering Mario Birkholz |
| title_fullStr | Thin film analysis by X-ray scattering Mario Birkholz |
| title_full_unstemmed | Thin film analysis by X-ray scattering Mario Birkholz |
| title_short | Thin film analysis by X-ray scattering |
| title_sort | thin film analysis by x ray scattering |
| topic | Thin films X-ray spectroscopy Röntgenstrukturanalyse (DE-588)4137203-7 gnd Röntgenstreuung (DE-588)4178324-4 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Thin films X-ray spectroscopy Röntgenstrukturanalyse Röntgenstreuung Dünne Schicht |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=013313193&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT birkholzmario thinfilmanalysisbyxrayscattering |