Scanning probe lithography
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| Hauptverfasser: | , , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Boston [u.a.]
Kluwer
2001
|
| Schriftenreihe: | Microsystems
|
| Schlagworte: | |
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MARC
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| 100 | 1 | |a Soh, Hyongsok T. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Scanning probe lithography |c by Hyongsok T. Soh ; Kathryn Wilder Guarini ; Calvin F. Quate |
| 264 | 1 | |a Boston [u.a.] |b Kluwer |c 2001 | |
| 300 | |a XXIII, 195 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
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| 490 | 0 | |a Microsystems | |
| 500 | |a Teilw. zugl.: Stanford Univ., Diss. von Hyongsok T. Soh und Kathryn Wilder Guarini | ||
| 650 | 4 | |a Circuits intégrés - Conception et construction | |
| 650 | 4 | |a Microlithographie | |
| 650 | 4 | |a Microscopie à sonde à balayage | |
| 650 | 4 | |a Integrated circuits |x Design and construction | |
| 650 | 4 | |a Microlithography | |
| 650 | 4 | |a Scanning probe microscopy | |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Rastersondenmikroskopie |0 (DE-588)4330328-6 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Rastersondenmikroskopie |0 (DE-588)4330328-6 |D s |
| 689 | 0 | 1 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Guarini, Kathryn Wilder |e Verfasser |4 aut | |
| 700 | 1 | |a Quate, Calvin F. |e Verfasser |4 aut | |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-009527423 | |
Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author | Soh, Hyongsok T. Guarini, Kathryn Wilder Quate, Calvin F. |
| author_facet | Soh, Hyongsok T. Guarini, Kathryn Wilder Quate, Calvin F. |
| author_role | aut aut aut |
| author_sort | Soh, Hyongsok T. |
| author_variant | h t s ht hts k w g kw kwg c f q cf cfq |
| building | Verbundindex |
| bvnumber | BV013923376 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 |
| callnumber-search | TK7874 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4170 |
| ctrlnum | (OCoLC)46866288 (DE-599)BVBBV013923376 |
| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/31 |
| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV013923376 |
| illustrated | Illustrated |
| indexdate | 2024-12-23T15:44:21Z |
| institution | BVB |
| isbn | 0792373618 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009527423 |
| oclc_num | 46866288 |
| open_access_boolean | |
| owner | DE-20 |
| owner_facet | DE-20 |
| physical | XXIII, 195 S. Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | Kluwer |
| record_format | marc |
| series2 | Microsystems |
| spelling | Soh, Hyongsok T. Verfasser aut Scanning probe lithography by Hyongsok T. Soh ; Kathryn Wilder Guarini ; Calvin F. Quate Boston [u.a.] Kluwer 2001 XXIII, 195 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microsystems Teilw. zugl.: Stanford Univ., Diss. von Hyongsok T. Soh und Kathryn Wilder Guarini Circuits intégrés - Conception et construction Microlithographie Microscopie à sonde à balayage Integrated circuits Design and construction Microlithography Scanning probe microscopy Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Rastersondenmikroskopie (DE-588)4330328-6 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Rastersondenmikroskopie (DE-588)4330328-6 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Guarini, Kathryn Wilder Verfasser aut Quate, Calvin F. Verfasser aut |
| spellingShingle | Soh, Hyongsok T. Guarini, Kathryn Wilder Quate, Calvin F. Scanning probe lithography Circuits intégrés - Conception et construction Microlithographie Microscopie à sonde à balayage Integrated circuits Design and construction Microlithography Scanning probe microscopy Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Rastersondenmikroskopie (DE-588)4330328-6 gnd |
| subject_GND | (DE-588)4191584-7 (DE-588)4330328-6 (DE-588)4113937-9 |
| title | Scanning probe lithography |
| title_auth | Scanning probe lithography |
| title_exact_search | Scanning probe lithography |
| title_full | Scanning probe lithography by Hyongsok T. Soh ; Kathryn Wilder Guarini ; Calvin F. Quate |
| title_fullStr | Scanning probe lithography by Hyongsok T. Soh ; Kathryn Wilder Guarini ; Calvin F. Quate |
| title_full_unstemmed | Scanning probe lithography by Hyongsok T. Soh ; Kathryn Wilder Guarini ; Calvin F. Quate |
| title_short | Scanning probe lithography |
| title_sort | scanning probe lithography |
| topic | Circuits intégrés - Conception et construction Microlithographie Microscopie à sonde à balayage Integrated circuits Design and construction Microlithography Scanning probe microscopy Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Rastersondenmikroskopie (DE-588)4330328-6 gnd |
| topic_facet | Circuits intégrés - Conception et construction Microlithographie Microscopie à sonde à balayage Integrated circuits Design and construction Microlithography Scanning probe microscopy Lithografie Halbleitertechnologie Rastersondenmikroskopie Hochschulschrift |
| work_keys_str_mv | AT sohhyongsokt scanningprobelithography AT guarinikathrynwilder scanningprobelithography AT quatecalvinf scanningprobelithography |