Handbook of VLSI microlithography principles, technology, and applications
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Park Ridge, NJ [u.a.]
Noyes Publ. [u.a.]
2001
|
| Ausgabe: | 2. ed. |
| Schriftenreihe: | Materials science and processing technology series
|
| Schlagworte: | |
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MARC
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| 245 | 1 | 0 | |a Handbook of VLSI microlithography |b principles, technology, and applications |c ed. by John N. Helbert |
| 250 | |a 2. ed. | ||
| 264 | 1 | |a Park Ridge, NJ [u.a.] |b Noyes Publ. [u.a.] |c 2001 | |
| 300 | |a XXI, 1001 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Materials science and processing technology series | |
| 650 | 4 | |a Integrated circuits |x Very large scale integration | |
| 650 | 4 | |a Microlithography | |
| 650 | 0 | 7 | |a Elektronenstrahllithografie |0 (DE-588)4151897-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a VLSI |0 (DE-588)4117388-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
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| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-009104501 | |
Datensatz im Suchindex
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| bvnumber | BV013350055 |
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| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4170 |
| ctrlnum | (OCoLC)43591143 (DE-599)BVBBV013350055 |
| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/31 |
| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2. ed. |
| format | Book |
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| id | DE-604.BV013350055 |
| illustrated | Illustrated |
| indexdate | 2024-12-23T15:26:07Z |
| institution | BVB |
| isbn | 0815514441 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009104501 |
| oclc_num | 43591143 |
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| owner | DE-703 DE-898 DE-BY-UBR DE-M347 DE-634 |
| owner_facet | DE-703 DE-898 DE-BY-UBR DE-M347 DE-634 |
| physical | XXI, 1001 S. Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | Noyes Publ. [u.a.] |
| record_format | marc |
| series2 | Materials science and processing technology series |
| spelling | Handbook of VLSI microlithography principles, technology, and applications ed. by John N. Helbert 2. ed. Park Ridge, NJ [u.a.] Noyes Publ. [u.a.] 2001 XXI, 1001 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials science and processing technology series Integrated circuits Very large scale integration Microlithography Elektronenstrahllithografie (DE-588)4151897-4 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf VLSI (DE-588)4117388-0 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s 1\p DE-604 Elektronenstrahllithografie (DE-588)4151897-4 s 2\p DE-604 Helbert, John N. Sonstige oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of VLSI microlithography principles, technology, and applications Integrated circuits Very large scale integration Microlithography Elektronenstrahllithografie (DE-588)4151897-4 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd VLSI (DE-588)4117388-0 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4151897-4 (DE-588)4174516-4 (DE-588)4117388-0 (DE-588)4191584-7 |
| title | Handbook of VLSI microlithography principles, technology, and applications |
| title_auth | Handbook of VLSI microlithography principles, technology, and applications |
| title_exact_search | Handbook of VLSI microlithography principles, technology, and applications |
| title_full | Handbook of VLSI microlithography principles, technology, and applications ed. by John N. Helbert |
| title_fullStr | Handbook of VLSI microlithography principles, technology, and applications ed. by John N. Helbert |
| title_full_unstemmed | Handbook of VLSI microlithography principles, technology, and applications ed. by John N. Helbert |
| title_short | Handbook of VLSI microlithography |
| title_sort | handbook of vlsi microlithography principles technology and applications |
| title_sub | principles, technology, and applications |
| topic | Integrated circuits Very large scale integration Microlithography Elektronenstrahllithografie (DE-588)4151897-4 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd VLSI (DE-588)4117388-0 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Integrated circuits Very large scale integration Microlithography Elektronenstrahllithografie Fotolithografie Halbleitertechnologie VLSI Lithografie Halbleitertechnologie |
| work_keys_str_mv | AT helbertjohnn handbookofvlsimicrolithographyprinciplestechnologyandapplications |