Digest of papers July 8 - 11, 1996, Kitakyushu, Japan

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Körperschaft: MicroProcess Conference Kitakyūshū (VerfasserIn)
Format: Tagungsbericht Buch
Sprache:English
Veröffentlicht: Tokyo Japan Soc. of Applied Physics [u.a.] 1996
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Datensatz im Suchindex

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spelling MicroProcess Conference 9 1996 Kitakyūshū Verfasser (DE-588)1901146-5 aut
Digest of papers July 8 - 11, 1996, Kitakyushu, Japan MicroProcess '96, the 9th International MicroProcess Conference
MicroProcess '96
Tokyo Japan Soc. of Applied Physics [u.a.] 1996
XVII, 268 S. Ill., graph. Darst.
txt rdacontent
n rdamedia
nc rdacarrier
Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf
(DE-588)1071861417 Konferenzschrift 1996 Kitakyūshū gnd-content
Lithografie Halbleitertechnologie (DE-588)4191584-7 s
DE-604
spellingShingle Digest of papers July 8 - 11, 1996, Kitakyushu, Japan
Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd
subject_GND (DE-588)4191584-7
(DE-588)1071861417
title Digest of papers July 8 - 11, 1996, Kitakyushu, Japan
title_alt MicroProcess '96
title_auth Digest of papers July 8 - 11, 1996, Kitakyushu, Japan
title_exact_search Digest of papers July 8 - 11, 1996, Kitakyushu, Japan
title_full Digest of papers July 8 - 11, 1996, Kitakyushu, Japan MicroProcess '96, the 9th International MicroProcess Conference
title_fullStr Digest of papers July 8 - 11, 1996, Kitakyushu, Japan MicroProcess '96, the 9th International MicroProcess Conference
title_full_unstemmed Digest of papers July 8 - 11, 1996, Kitakyushu, Japan MicroProcess '96, the 9th International MicroProcess Conference
title_short Digest of papers
title_sort digest of papers july 8 11 1996 kitakyushu japan
title_sub July 8 - 11, 1996, Kitakyushu, Japan
topic Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd
topic_facet Lithografie Halbleitertechnologie
Konferenzschrift 1996 Kitakyūshū
work_keys_str_mv AT microprocessconferencekitakyushu digestofpapersjuly8111996kitakyushujapan
AT microprocessconferencekitakyushu microprocess96