Digest of papers July 13 - 16, 1992, Kawasaki, Japan
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| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Tokyo
Japan Soc. of Applied Physics [u.a.]
1992
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MARC
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| genre | (DE-588)1071861417 Konferenzschrift 1992 Kawasaki gnd-content |
| genre_facet | Konferenzschrift 1992 Kawasaki |
| id | DE-604.BV013228702 |
| illustrated | Illustrated |
| indexdate | 2024-12-23T15:23:59Z |
| institution | BVB |
| institution_GND | (DE-588)5078043-8 |
| isbn | 4930813484 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009015654 |
| oclc_num | 78326079 |
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| owner | DE-703 |
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| physical | XVIII, 230 S. Ill., graph. Darst. |
| publishDate | 1992 |
| publishDateSearch | 1992 |
| publishDateSort | 1992 |
| publisher | Japan Soc. of Applied Physics [u.a.] |
| record_format | marc |
| spelling | MicroProcess Conference 5 1992 Kanagawa Verfasser (DE-588)5078043-8 aut Digest of papers July 13 - 16, 1992, Kawasaki, Japan MicroProcess '92, the 5th International MicroProcess Conference MicroProcess '92 Tokyo Japan Soc. of Applied Physics [u.a.] 1992 XVIII, 230 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Photoresists Congresses Semiconductors Etching Congresses X-ray lithography Congresses Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1992 Kawasaki gnd-content Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 |
| spellingShingle | Digest of papers July 13 - 16, 1992, Kawasaki, Japan Photoresists Congresses Semiconductors Etching Congresses X-ray lithography Congresses Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 (DE-588)1071861417 |
| title | Digest of papers July 13 - 16, 1992, Kawasaki, Japan |
| title_alt | MicroProcess '92 |
| title_auth | Digest of papers July 13 - 16, 1992, Kawasaki, Japan |
| title_exact_search | Digest of papers July 13 - 16, 1992, Kawasaki, Japan |
| title_full | Digest of papers July 13 - 16, 1992, Kawasaki, Japan MicroProcess '92, the 5th International MicroProcess Conference |
| title_fullStr | Digest of papers July 13 - 16, 1992, Kawasaki, Japan MicroProcess '92, the 5th International MicroProcess Conference |
| title_full_unstemmed | Digest of papers July 13 - 16, 1992, Kawasaki, Japan MicroProcess '92, the 5th International MicroProcess Conference |
| title_short | Digest of papers |
| title_sort | digest of papers july 13 16 1992 kawasaki japan |
| title_sub | July 13 - 16, 1992, Kawasaki, Japan |
| topic | Photoresists Congresses Semiconductors Etching Congresses X-ray lithography Congresses Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Photoresists Congresses Semiconductors Etching Congresses X-ray lithography Congresses Lithografie Halbleitertechnologie Konferenzschrift 1992 Kawasaki |
| work_keys_str_mv | AT microprocessconferencekanagawa digestofpapersjuly13161992kawasakijapan AT microprocessconferencekanagawa microprocess92 |