Photomask Japan '97 digest of papers ; 17 - 18 April 1997, Kawasaki, Japan
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| Format: | Tagungsbericht Buch |
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| Sprache: | Undetermined |
| Veröffentlicht: |
Tokyo
Photomask Japan [u.a.]
1997
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| 300 | |a XIII, 115 S. |b Ill., graph. Darst. | ||
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Datensatz im Suchindex
| _version_ | 1804127988933984256 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV013228569 |
| classification_rvk | ZN 4170 |
| ctrlnum | (OCoLC)634943721 (DE-599)BVBBV013228569 |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1997 Kawasaki gnd-content |
| genre_facet | Konferenzschrift 1997 Kawasaki |
| id | DE-604.BV013228569 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:42:06Z |
| institution | BVB |
| institution_GND | (DE-588)6025718-0 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009015542 |
| oclc_num | 634943721 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | XIII, 115 S. Ill., graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | Photomask Japan [u.a.] |
| record_format | marc |
| spelling | Photomask Japan '97 digest of papers ; 17 - 18 April 1997, Kawasaki, Japan Symposium on Photomask and X-Ray Mask Technology IV Digest of papers Tokyo Photomask Japan [u.a.] 1997 XIII, 115 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Maskentechnik (DE-588)4125845-9 gnd rswk-swf Fotolithografie (DE-588)4274823-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1997 Kawasaki gnd-content Fotolithografie (DE-588)4274823-9 s Maskentechnik (DE-588)4125845-9 s DE-604 Symposium on Photomask and X-Ray Mask Technology 4 1997 Kawasaki, Kanagawa-ken Sonstige (DE-588)6025718-0 oth |
| spellingShingle | Photomask Japan '97 digest of papers ; 17 - 18 April 1997, Kawasaki, Japan Maskentechnik (DE-588)4125845-9 gnd Fotolithografie (DE-588)4274823-9 gnd |
| subject_GND | (DE-588)4125845-9 (DE-588)4274823-9 (DE-588)1071861417 |
| title | Photomask Japan '97 digest of papers ; 17 - 18 April 1997, Kawasaki, Japan |
| title_alt | Digest of papers |
| title_auth | Photomask Japan '97 digest of papers ; 17 - 18 April 1997, Kawasaki, Japan |
| title_exact_search | Photomask Japan '97 digest of papers ; 17 - 18 April 1997, Kawasaki, Japan |
| title_full | Photomask Japan '97 digest of papers ; 17 - 18 April 1997, Kawasaki, Japan Symposium on Photomask and X-Ray Mask Technology IV |
| title_fullStr | Photomask Japan '97 digest of papers ; 17 - 18 April 1997, Kawasaki, Japan Symposium on Photomask and X-Ray Mask Technology IV |
| title_full_unstemmed | Photomask Japan '97 digest of papers ; 17 - 18 April 1997, Kawasaki, Japan Symposium on Photomask and X-Ray Mask Technology IV |
| title_short | Photomask Japan '97 |
| title_sort | photomask japan 97 digest of papers 17 18 april 1997 kawasaki japan |
| title_sub | digest of papers ; 17 - 18 April 1997, Kawasaki, Japan |
| topic | Maskentechnik (DE-588)4125845-9 gnd Fotolithografie (DE-588)4274823-9 gnd |
| topic_facet | Maskentechnik Fotolithografie Konferenzschrift 1997 Kawasaki |
| work_keys_str_mv | AT symposiumonphotomaskandxraymasktechnologykawasakikanagawaken photomaskjapan97digestofpapers1718april1997kawasakijapan AT symposiumonphotomaskandxraymasktechnologykawasakikanagawaken digestofpapers |