Sub-half-micron lithography for ULSIs
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| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Cambridge [u.a.]
Cambridge Univ. Press
2000
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| Ausgabe: | 1. publ. |
| Schlagworte: | |
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MARC
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| 245 | 1 | 0 | |a Sub-half-micron lithography for ULSIs |c ed. by Katsumi Suzuki ... |
| 250 | |a 1. publ. | ||
| 264 | 1 | |a Cambridge [u.a.] |b Cambridge Univ. Press |c 2000 | |
| 300 | |a XVII, 323 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 650 | 4 | |a Integrated circuits - Ultra large scale integration | |
| 650 | 4 | |a Photolithography | |
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| 650 | 4 | |a Microlithography | |
| 650 | 4 | |a Printed circuits |x Design and construction | |
| 650 | 0 | 7 | |a ULSI |0 (DE-588)4226286-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a ULSI |0 (DE-588)4226286-0 |D s |
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| 700 | 1 | |a Suzuki, Katsumi |e Sonstige |4 oth | |
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Datensatz im Suchindex
| _version_ | 1819244869510496262 |
|---|---|
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| building | Verbundindex |
| bvnumber | BV013044358 |
| callnumber-first | T - Technology |
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| callnumber-search | TK7874.76 |
| callnumber-sort | TK 47874.76 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
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| ctrlnum | (OCoLC)40646589 (DE-599)BVBBV013044358 |
| dewey-full | 621.39/5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.39/5 |
| dewey-search | 621.39/5 |
| dewey-sort | 3621.39 15 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 1. publ. |
| format | Book |
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| id | DE-604.BV013044358 |
| illustrated | Illustrated |
| indexdate | 2024-12-23T15:18:27Z |
| institution | BVB |
| isbn | 0521570808 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008887029 |
| oclc_num | 40646589 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | XVII, 323 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | Cambridge Univ. Press |
| record_format | marc |
| spelling | Sub-half-micron lithography for ULSIs ed. by Katsumi Suzuki ... 1. publ. Cambridge [u.a.] Cambridge Univ. Press 2000 XVII, 323 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Integrated circuits - Ultra large scale integration Photolithography Integrated circuits Ultra large scale integration Design and construction Microlithography Printed circuits Design and construction ULSI (DE-588)4226286-0 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf ULSI (DE-588)4226286-0 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Suzuki, Katsumi Sonstige oth |
| spellingShingle | Sub-half-micron lithography for ULSIs Integrated circuits - Ultra large scale integration Photolithography Integrated circuits Ultra large scale integration Design and construction Microlithography Printed circuits Design and construction ULSI (DE-588)4226286-0 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4226286-0 (DE-588)4191584-7 |
| title | Sub-half-micron lithography for ULSIs |
| title_auth | Sub-half-micron lithography for ULSIs |
| title_exact_search | Sub-half-micron lithography for ULSIs |
| title_full | Sub-half-micron lithography for ULSIs ed. by Katsumi Suzuki ... |
| title_fullStr | Sub-half-micron lithography for ULSIs ed. by Katsumi Suzuki ... |
| title_full_unstemmed | Sub-half-micron lithography for ULSIs ed. by Katsumi Suzuki ... |
| title_short | Sub-half-micron lithography for ULSIs |
| title_sort | sub half micron lithography for ulsis |
| topic | Integrated circuits - Ultra large scale integration Photolithography Integrated circuits Ultra large scale integration Design and construction Microlithography Printed circuits Design and construction ULSI (DE-588)4226286-0 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Integrated circuits - Ultra large scale integration Photolithography Integrated circuits Ultra large scale integration Design and construction Microlithography Printed circuits Design and construction ULSI Lithografie Halbleitertechnologie |
| work_keys_str_mv | AT suzukikatsumi subhalfmicronlithographyforulsis |