Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997

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Veröffentlicht: Woodbury, NY AIP, American Inst. of Physics 1998
Schriftenreihe:American Institute of Physics <New York, NY>: AIP conference proceedings 418
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physical IX, 519 S. Ill., graph. Darst.
publishDate 1998
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series American Institute of Physics <New York, NY>: AIP conference proceedings
series2 American Institute of Physics <New York, NY>: AIP conference proceedings
spelling Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997 eds.: Hidekazu Okabayashi ...
Woodbury, NY AIP, American Inst. of Physics 1998
IX, 519 S. Ill., graph. Darst.
txt rdacontent
n rdamedia
nc rdacarrier
American Institute of Physics <New York, NY>: AIP conference proceedings 418
Elektromigration (DE-588)4296761-2 gnd rswk-swf
Metallisieren (DE-588)4169599-9 gnd rswk-swf
(DE-588)1071861417 Konferenzschrift 1997 Tokio gnd-content
Metallisieren (DE-588)4169599-9 s
Elektromigration (DE-588)4296761-2 s
DE-604
Okabayashi, Hidekazu Sonstige oth
International Workshop on Stress Induced Phenomena in Metallization 4 1997 Tokio Sonstige (DE-588)5330531-0 oth
American Institute of Physics <New York, NY>: AIP conference proceedings 418 (DE-604)BV001899984 418
spellingShingle Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997
American Institute of Physics <New York, NY>: AIP conference proceedings
Elektromigration (DE-588)4296761-2 gnd
Metallisieren (DE-588)4169599-9 gnd
subject_GND (DE-588)4296761-2
(DE-588)4169599-9
(DE-588)1071861417
title Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997
title_auth Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997
title_exact_search Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997
title_full Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997 eds.: Hidekazu Okabayashi ...
title_fullStr Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997 eds.: Hidekazu Okabayashi ...
title_full_unstemmed Stress induced phenomena in metallization fourth international workshop, Tokyo, Japan, June 1997 eds.: Hidekazu Okabayashi ...
title_short Stress induced phenomena in metallization
title_sort stress induced phenomena in metallization fourth international workshop tokyo japan june 1997
title_sub fourth international workshop, Tokyo, Japan, June 1997
topic Elektromigration (DE-588)4296761-2 gnd
Metallisieren (DE-588)4169599-9 gnd
topic_facet Elektromigration
Metallisieren
Konferenzschrift 1997 Tokio
volume_link (DE-604)BV001899984
work_keys_str_mv AT okabayashihidekazu stressinducedphenomenainmetallizationfourthinternationalworkshoptokyojapanjune1997
AT internationalworkshoponstressinducedphenomenainmetallizationtokio stressinducedphenomenainmetallizationfourthinternationalworkshoptokyojapanjune1997