Giga-scale CMOS technology 3 Dry etching for ULSI
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| Format: | Video VHS |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Piscataway, NJ
IEEE, Educational Activities Department
[ca. 1997]
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Datensatz im Suchindex
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| illustrated | Not Illustrated |
| indexdate | 2024-08-01T10:50:45Z |
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| physical | 1 Videokassette (83 Min.) |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | IEEE, Educational Activities Department |
| record_format | marc |
| spellingShingle | Giga-scale CMOS technology |
| title | Giga-scale CMOS technology |
| title_auth | Giga-scale CMOS technology |
| title_exact_search | Giga-scale CMOS technology |
| title_full | Giga-scale CMOS technology 3 Dry etching for ULSI [course organized by Eiji Takeda, Hitachi] |
| title_fullStr | Giga-scale CMOS technology 3 Dry etching for ULSI [course organized by Eiji Takeda, Hitachi] |
| title_full_unstemmed | Giga-scale CMOS technology 3 Dry etching for ULSI [course organized by Eiji Takeda, Hitachi] |
| title_short | Giga-scale CMOS technology |
| title_sort | giga scale cmos technology dry etching for ulsi |
| volume_link | (DE-604)BV012013903 |
| work_keys_str_mv | AT takedaeiji gigascalecmostechnology3 |