Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A
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Format: | Buch |
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Sprache: | English |
Veröffentlicht: |
Pittsburgh, Pa.
Materials Research Soc.
1997
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Schriftenreihe: | Materials Research Society: Materials Research Society symposia proceedings
447 |
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LEADER | 00000nam a2200000 cb4500 | ||
---|---|---|---|
001 | BV011958805 | ||
003 | DE-604 | ||
005 | 19980525 | ||
007 | t| | ||
008 | 980525s1997 xx ad|| |||| 10||| eng d | ||
020 | |a 1558993517 |9 1-55899-351-7 | ||
035 | |a (OCoLC)36630023 | ||
035 | |a (DE-599)BVBBV011958805 | ||
040 | |a DE-604 |b ger |e rakddb | ||
041 | 0 | |a eng | |
049 | |a DE-29T |a DE-703 |a DE-83 | ||
050 | 0 | |a TK7836 | |
082 | 0 | |a 363.11/9621384134 |2 21 | |
084 | |a UD 8400 |0 (DE-625)145545: |2 rvk | ||
245 | 1 | 0 | |a Environmental, safety, and health issues in ic production |b symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A |c eds.: Rafael Reif ... |
264 | 1 | |a Pittsburgh, Pa. |b Materials Research Soc. |c 1997 | |
300 | |a IX, 154 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
490 | 1 | |a Materials Research Society: Materials Research Society symposia proceedings |v 447 | |
650 | 4 | |a Green technology |v Congresses | |
650 | 4 | |a Integrated circuits industry |x Safety measures |v Congresses | |
650 | 4 | |a Manufacturing processes |x Safety measures |v Congresses | |
650 | 4 | |a Semiconductor industry |x Safety measures |v Congresses | |
650 | 0 | 7 | |a Fertigung |0 (DE-588)4016899-2 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Technische Sicherheit |0 (DE-588)4059233-9 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Halbleiterindustrie |0 (DE-588)4158803-4 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1996 |z Boston Mass. |2 gnd-content | |
689 | 0 | 0 | |a Halbleiterindustrie |0 (DE-588)4158803-4 |D s |
689 | 0 | 1 | |a Technische Sicherheit |0 (DE-588)4059233-9 |D s |
689 | 0 | 2 | |a Fertigung |0 (DE-588)4016899-2 |D s |
689 | 0 | |5 DE-604 | |
700 | 1 | |a Reif, Rafael |e Sonstige |4 oth | |
830 | 0 | |a Materials Research Society: Materials Research Society symposia proceedings |v 447 |w (DE-604)BV001899105 |9 447 | |
943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-008086342 |
Datensatz im Suchindex
_version_ | 1819242802739937280 |
---|---|
any_adam_object | |
building | Verbundindex |
bvnumber | BV011958805 |
callnumber-first | T - Technology |
callnumber-label | TK7836 |
callnumber-raw | TK7836 |
callnumber-search | TK7836 |
callnumber-sort | TK 47836 |
callnumber-subject | TK - Electrical and Nuclear Engineering |
classification_rvk | UD 8400 |
ctrlnum | (OCoLC)36630023 (DE-599)BVBBV011958805 |
dewey-full | 363.11/9621384134 |
dewey-hundreds | 300 - Social sciences |
dewey-ones | 363 - Other social problems and services |
dewey-raw | 363.11/9621384134 |
dewey-search | 363.11/9621384134 |
dewey-sort | 3363.11 109621384134 |
dewey-tens | 360 - Social problems and services; associations |
discipline | Physik Soziologie |
format | Book |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01896nam a2200457 cb4500</leader><controlfield tag="001">BV011958805</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19980525 </controlfield><controlfield tag="007">t|</controlfield><controlfield tag="008">980525s1997 xx ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1558993517</subfield><subfield code="9">1-55899-351-7</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)36630023</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV011958805</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7836</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">363.11/9621384134</subfield><subfield code="2">21</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UD 8400</subfield><subfield code="0">(DE-625)145545:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Environmental, safety, and health issues in ic production</subfield><subfield code="b">symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A</subfield><subfield code="c">eds.: Rafael Reif ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Pittsburgh, Pa.</subfield><subfield code="b">Materials Research Soc.</subfield><subfield code="c">1997</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">IX, 154 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Materials Research Society: Materials Research Society symposia proceedings</subfield><subfield code="v">447</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Green technology</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Integrated circuits industry</subfield><subfield code="x">Safety measures</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Manufacturing processes</subfield><subfield code="x">Safety measures</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductor industry</subfield><subfield code="x">Safety measures</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fertigung</subfield><subfield code="0">(DE-588)4016899-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Technische Sicherheit</subfield><subfield code="0">(DE-588)4059233-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiterindustrie</subfield><subfield code="0">(DE-588)4158803-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1996</subfield><subfield code="z">Boston Mass.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiterindustrie</subfield><subfield code="0">(DE-588)4158803-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Technische Sicherheit</subfield><subfield code="0">(DE-588)4059233-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Fertigung</subfield><subfield code="0">(DE-588)4016899-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Reif, Rafael</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Materials Research Society: Materials Research Society symposia proceedings</subfield><subfield code="v">447</subfield><subfield code="w">(DE-604)BV001899105</subfield><subfield code="9">447</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-008086342</subfield></datafield></record></collection> |
genre | (DE-588)1071861417 Konferenzschrift 1996 Boston Mass. gnd-content |
genre_facet | Konferenzschrift 1996 Boston Mass. |
id | DE-604.BV011958805 |
illustrated | Illustrated |
indexdate | 2024-12-23T14:45:36Z |
institution | BVB |
isbn | 1558993517 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008086342 |
oclc_num | 36630023 |
open_access_boolean | |
owner | DE-29T DE-703 DE-83 |
owner_facet | DE-29T DE-703 DE-83 |
physical | IX, 154 S. Ill., graph. Darst. |
publishDate | 1997 |
publishDateSearch | 1997 |
publishDateSort | 1997 |
publisher | Materials Research Soc. |
record_format | marc |
series | Materials Research Society: Materials Research Society symposia proceedings |
series2 | Materials Research Society: Materials Research Society symposia proceedings |
spelling | Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A eds.: Rafael Reif ... Pittsburgh, Pa. Materials Research Soc. 1997 IX, 154 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 447 Green technology Congresses Integrated circuits industry Safety measures Congresses Manufacturing processes Safety measures Congresses Semiconductor industry Safety measures Congresses Fertigung (DE-588)4016899-2 gnd rswk-swf Technische Sicherheit (DE-588)4059233-9 gnd rswk-swf Halbleiterindustrie (DE-588)4158803-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1996 Boston Mass. gnd-content Halbleiterindustrie (DE-588)4158803-4 s Technische Sicherheit (DE-588)4059233-9 s Fertigung (DE-588)4016899-2 s DE-604 Reif, Rafael Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 447 (DE-604)BV001899105 447 |
spellingShingle | Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A Materials Research Society: Materials Research Society symposia proceedings Green technology Congresses Integrated circuits industry Safety measures Congresses Manufacturing processes Safety measures Congresses Semiconductor industry Safety measures Congresses Fertigung (DE-588)4016899-2 gnd Technische Sicherheit (DE-588)4059233-9 gnd Halbleiterindustrie (DE-588)4158803-4 gnd |
subject_GND | (DE-588)4016899-2 (DE-588)4059233-9 (DE-588)4158803-4 (DE-588)1071861417 |
title | Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A |
title_auth | Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A |
title_exact_search | Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A |
title_full | Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A eds.: Rafael Reif ... |
title_fullStr | Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A eds.: Rafael Reif ... |
title_full_unstemmed | Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A eds.: Rafael Reif ... |
title_short | Environmental, safety, and health issues in ic production |
title_sort | environmental safety and health issues in ic production symposium held december 4 5 1996 boston massachusetts u s a |
title_sub | symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A |
topic | Green technology Congresses Integrated circuits industry Safety measures Congresses Manufacturing processes Safety measures Congresses Semiconductor industry Safety measures Congresses Fertigung (DE-588)4016899-2 gnd Technische Sicherheit (DE-588)4059233-9 gnd Halbleiterindustrie (DE-588)4158803-4 gnd |
topic_facet | Green technology Congresses Integrated circuits industry Safety measures Congresses Manufacturing processes Safety measures Congresses Semiconductor industry Safety measures Congresses Fertigung Technische Sicherheit Halbleiterindustrie Konferenzschrift 1996 Boston Mass. |
volume_link | (DE-604)BV001899105 |
work_keys_str_mv | AT reifrafael environmentalsafetyandhealthissuesinicproductionsymposiumhelddecember451996bostonmassachusettsusa |