Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A

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Sprache:English
Veröffentlicht: Pittsburgh, Pa. Materials Research Soc. 1997
Schriftenreihe:Materials Research Society: Materials Research Society symposia proceedings 447
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Datensatz im Suchindex

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publishDate 1997
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publisher Materials Research Soc.
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series Materials Research Society: Materials Research Society symposia proceedings
series2 Materials Research Society: Materials Research Society symposia proceedings
spelling Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A eds.: Rafael Reif ...
Pittsburgh, Pa. Materials Research Soc. 1997
IX, 154 S. Ill., graph. Darst.
txt rdacontent
n rdamedia
nc rdacarrier
Materials Research Society: Materials Research Society symposia proceedings 447
Green technology Congresses
Integrated circuits industry Safety measures Congresses
Manufacturing processes Safety measures Congresses
Semiconductor industry Safety measures Congresses
Fertigung (DE-588)4016899-2 gnd rswk-swf
Technische Sicherheit (DE-588)4059233-9 gnd rswk-swf
Halbleiterindustrie (DE-588)4158803-4 gnd rswk-swf
(DE-588)1071861417 Konferenzschrift 1996 Boston Mass. gnd-content
Halbleiterindustrie (DE-588)4158803-4 s
Technische Sicherheit (DE-588)4059233-9 s
Fertigung (DE-588)4016899-2 s
DE-604
Reif, Rafael Sonstige oth
Materials Research Society: Materials Research Society symposia proceedings 447 (DE-604)BV001899105 447
spellingShingle Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A
Materials Research Society: Materials Research Society symposia proceedings
Green technology Congresses
Integrated circuits industry Safety measures Congresses
Manufacturing processes Safety measures Congresses
Semiconductor industry Safety measures Congresses
Fertigung (DE-588)4016899-2 gnd
Technische Sicherheit (DE-588)4059233-9 gnd
Halbleiterindustrie (DE-588)4158803-4 gnd
subject_GND (DE-588)4016899-2
(DE-588)4059233-9
(DE-588)4158803-4
(DE-588)1071861417
title Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A
title_auth Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A
title_exact_search Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A
title_full Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A eds.: Rafael Reif ...
title_fullStr Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A eds.: Rafael Reif ...
title_full_unstemmed Environmental, safety, and health issues in ic production symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A eds.: Rafael Reif ...
title_short Environmental, safety, and health issues in ic production
title_sort environmental safety and health issues in ic production symposium held december 4 5 1996 boston massachusetts u s a
title_sub symposium held December 4 - 5, 1996, Boston, Massachusetts, U.S.A
topic Green technology Congresses
Integrated circuits industry Safety measures Congresses
Manufacturing processes Safety measures Congresses
Semiconductor industry Safety measures Congresses
Fertigung (DE-588)4016899-2 gnd
Technische Sicherheit (DE-588)4059233-9 gnd
Halbleiterindustrie (DE-588)4158803-4 gnd
topic_facet Green technology Congresses
Integrated circuits industry Safety measures Congresses
Manufacturing processes Safety measures Congresses
Semiconductor industry Safety measures Congresses
Fertigung
Technische Sicherheit
Halbleiterindustrie
Konferenzschrift 1996 Boston Mass.
volume_link (DE-604)BV001899105
work_keys_str_mv AT reifrafael environmentalsafetyandhealthissuesinicproductionsymposiumhelddecember451996bostonmassachusettsusa