Characterisation of silicon on insulator material with X-ray diffraction topography
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| Format: | Abschlussarbeit Buch |
| Sprache: | English |
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1997
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MARC
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| 100 | 1 | |a Ohler, Michael |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Characterisation of silicon on insulator material with X-ray diffraction topography |c von Michael Ohler |
| 264 | 1 | |c 1997 | |
| 300 | |a 114 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 502 | |a Berlin, Humboldt-Univ., Diss., 1997 | ||
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Datensatz im Suchindex
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| DE-BY-TUM_local_keycode | di |
| DE-BY-TUM_media_number | 040003423016 |
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| any_adam_object | |
| author | Ohler, Michael |
| author_facet | Ohler, Michael |
| author_role | aut |
| author_sort | Ohler, Michael |
| author_variant | m o mo |
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| classification_rvk | UQ 5100 |
| classification_tum | PHY 658d PHY 606d |
| ctrlnum | (OCoLC)632524512 (DE-599)BVBBV011620027 |
| discipline | Physik |
| format | Thesis Book |
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| id | DE-604.BV011620027 |
| illustrated | Illustrated |
| indexdate | 2024-11-25T17:14:19Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-007828651 |
| oclc_num | 632524512 |
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| physical | 114 S. Ill., graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| record_format | marc |
| spellingShingle | Ohler, Michael Characterisation of silicon on insulator material with X-ray diffraction topography Röntgendiffraktometrie (DE-588)4336833-5 gnd Mehrschichtsystem (DE-588)4244347-7 gnd Silicium (DE-588)4077445-4 gnd |
| subject_GND | (DE-588)4336833-5 (DE-588)4244347-7 (DE-588)4077445-4 (DE-588)4113937-9 |
| title | Characterisation of silicon on insulator material with X-ray diffraction topography |
| title_auth | Characterisation of silicon on insulator material with X-ray diffraction topography |
| title_exact_search | Characterisation of silicon on insulator material with X-ray diffraction topography |
| title_full | Characterisation of silicon on insulator material with X-ray diffraction topography von Michael Ohler |
| title_fullStr | Characterisation of silicon on insulator material with X-ray diffraction topography von Michael Ohler |
| title_full_unstemmed | Characterisation of silicon on insulator material with X-ray diffraction topography von Michael Ohler |
| title_short | Characterisation of silicon on insulator material with X-ray diffraction topography |
| title_sort | characterisation of silicon on insulator material with x ray diffraction topography |
| topic | Röntgendiffraktometrie (DE-588)4336833-5 gnd Mehrschichtsystem (DE-588)4244347-7 gnd Silicium (DE-588)4077445-4 gnd |
| topic_facet | Röntgendiffraktometrie Mehrschichtsystem Silicium Hochschulschrift |
| work_keys_str_mv | AT ohlermichael characterisationofsilicononinsulatormaterialwithxraydiffractiontopography |