Semiconductors and semimetals 45 Effect of disorder and defects in ion implanted semiconductors: electrical and physicochemical characterization

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Veröffentlicht: New York, NY Acad. Press 1997
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discipline Elektrotechnik / Elektronik / Nachrichtentechnik
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isbn 0127521453
language English
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physical XIX, 300 S. Ill., graph. Darst.
publishDate 1997
publishDateSearch 1997
publishDateSort 1997
publisher Acad. Press
record_format marc
spelling Semiconductors and semimetals 45 Effect of disorder and defects in ion implanted semiconductors: electrical and physicochemical characterization
New York, NY Acad. Press 1997
XIX, 300 S. Ill., graph. Darst.
txt rdacontent
n rdamedia
nc rdacarrier
Ion implantation
Semiconductors
Semimetals
(DE-604)BV002590004 45
spellingShingle Semiconductors and semimetals
Ion implantation
Semiconductors
Semimetals
title Semiconductors and semimetals
title_auth Semiconductors and semimetals
title_exact_search Semiconductors and semimetals
title_full Semiconductors and semimetals 45 Effect of disorder and defects in ion implanted semiconductors: electrical and physicochemical characterization
title_fullStr Semiconductors and semimetals 45 Effect of disorder and defects in ion implanted semiconductors: electrical and physicochemical characterization
title_full_unstemmed Semiconductors and semimetals 45 Effect of disorder and defects in ion implanted semiconductors: electrical and physicochemical characterization
title_short Semiconductors and semimetals
title_sort semiconductors and semimetals effect of disorder and defects in ion implanted semiconductors electrical and physicochemical characterization
topic Ion implantation
Semiconductors
Semimetals
topic_facet Ion implantation
Semiconductors
Semimetals
volume_link (DE-604)BV002590004