Autocorrelation of cycle times in semiconductor manufacturing systems
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Würzburg
1995
|
| Schriftenreihe: | Institut für Informatik <Würzburg>: Report
107 |
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MARC
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| 100 | 1 | |a Schömig, Alexander K. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Autocorrelation of cycle times in semiconductor manufacturing systems |c Alexander K. Schömig and Manfred Mittler |
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Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author | Schömig, Alexander K. Mittler, Manfred |
| author_facet | Schömig, Alexander K. Mittler, Manfred |
| author_role | aut aut |
| author_sort | Schömig, Alexander K. |
| author_variant | a k s ak aks m m mm |
| building | Verbundindex |
| bvnumber | BV010133907 |
| ctrlnum | (OCoLC)634386186 (DE-599)BVBBV010133907 |
| format | Book |
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| id | DE-604.BV010133907 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:47:07Z |
| institution | BVB |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006730934 |
| oclc_num | 634386186 |
| open_access_boolean | |
| owner | DE-20 |
| owner_facet | DE-20 |
| physical | 11 S. graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| record_format | marc |
| series | Institut für Informatik <Würzburg>: Report |
| series2 | Institut für Informatik <Würzburg>: Report |
| spelling | Schömig, Alexander K. Verfasser aut Autocorrelation of cycle times in semiconductor manufacturing systems Alexander K. Schömig and Manfred Mittler Würzburg 1995 11 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Institut für Informatik <Würzburg>: Report 107 Mittler, Manfred Verfasser aut Institut für Informatik <Würzburg>: Report 107 (DE-604)BV007935168 107 |
| spellingShingle | Schömig, Alexander K. Mittler, Manfred Autocorrelation of cycle times in semiconductor manufacturing systems Institut für Informatik <Würzburg>: Report |
| title | Autocorrelation of cycle times in semiconductor manufacturing systems |
| title_auth | Autocorrelation of cycle times in semiconductor manufacturing systems |
| title_exact_search | Autocorrelation of cycle times in semiconductor manufacturing systems |
| title_full | Autocorrelation of cycle times in semiconductor manufacturing systems Alexander K. Schömig and Manfred Mittler |
| title_fullStr | Autocorrelation of cycle times in semiconductor manufacturing systems Alexander K. Schömig and Manfred Mittler |
| title_full_unstemmed | Autocorrelation of cycle times in semiconductor manufacturing systems Alexander K. Schömig and Manfred Mittler |
| title_short | Autocorrelation of cycle times in semiconductor manufacturing systems |
| title_sort | autocorrelation of cycle times in semiconductor manufacturing systems |
| volume_link | (DE-604)BV007935168 |
| work_keys_str_mv | AT schomigalexanderk autocorrelationofcycletimesinsemiconductormanufacturingsystems AT mittlermanfred autocorrelationofcycletimesinsemiconductormanufacturingsystems |