The reaction mechanism of W-CVD on Si
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| Format: | Buch |
| Sprache: | English |
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1993
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MARC
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| 100 | 1 | |a Groenen, Paul A. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a The reaction mechanism of W-CVD on Si |c door Paulus Adrianus Cornelis Groenen |
| 264 | 1 | |c 1993 | |
| 300 | |a VI, 106 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Eindhoven, Technische Univ., Diss., 1993 | ||
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Datensatz im Suchindex
| DE-BY-TUM_call_number | 0001 DA 94 1168 |
|---|---|
| DE-BY-TUM_katkey | 623523 |
| DE-BY-TUM_location | Mag |
| DE-BY-TUM_media_number | 040003416380 |
| _version_ | 1820800226353479681 |
| any_adam_object | |
| author | Groenen, Paul A. |
| author_facet | Groenen, Paul A. |
| author_role | aut |
| author_sort | Groenen, Paul A. |
| author_variant | p a g pa pag |
| building | Verbundindex |
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| discipline | Werkstoffwissenschaften / Fertigungstechnik |
| format | Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV009543465 |
| illustrated | Illustrated |
| indexdate | 2024-12-23T13:20:08Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-006303843 |
| oclc_num | 64578084 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | VI, 106 S. Ill., graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| record_format | marc |
| spellingShingle | Groenen, Paul A. The reaction mechanism of W-CVD on Si Wolfram (DE-588)4066862-9 gnd CVD-Verfahren (DE-588)4009846-1 gnd Silicium (DE-588)4077445-4 gnd |
| subject_GND | (DE-588)4066862-9 (DE-588)4009846-1 (DE-588)4077445-4 (DE-588)4113937-9 |
| title | The reaction mechanism of W-CVD on Si |
| title_auth | The reaction mechanism of W-CVD on Si |
| title_exact_search | The reaction mechanism of W-CVD on Si |
| title_full | The reaction mechanism of W-CVD on Si door Paulus Adrianus Cornelis Groenen |
| title_fullStr | The reaction mechanism of W-CVD on Si door Paulus Adrianus Cornelis Groenen |
| title_full_unstemmed | The reaction mechanism of W-CVD on Si door Paulus Adrianus Cornelis Groenen |
| title_short | The reaction mechanism of W-CVD on Si |
| title_sort | the reaction mechanism of w cvd on si |
| topic | Wolfram (DE-588)4066862-9 gnd CVD-Verfahren (DE-588)4009846-1 gnd Silicium (DE-588)4077445-4 gnd |
| topic_facet | Wolfram CVD-Verfahren Silicium Hochschulschrift |
| work_keys_str_mv | AT groenenpaula thereactionmechanismofwcvdonsi |