Ion bombardment modification of surfaces fundamentals and applications

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Format: Buch
Sprache:English
Veröffentlicht: Amsterdam u.a. Elsevier 1984
Schriftenreihe:Beam modification of materials 1.
Schlagworte:
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245 1 0 |a Ion bombardment modification of surfaces  |b fundamentals and applications  |c ed. by Orlando Auciello 
264 1 |a Amsterdam u.a.  |b Elsevier  |c 1984 
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Datensatz im Suchindex

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physical XVII, 466 S. Ill., graph. Darst.
psigel TUB-nseb
publishDate 1984
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publishDateSort 1984
publisher Elsevier
record_format marc
series Beam modification of materials
series2 Beam modification of materials
spellingShingle Ion bombardment modification of surfaces fundamentals and applications
Beam modification of materials
Bombardement ionique
Ions - Implantation
Pulvérisation cathodique
Surfaces (Technologie)
Ion bombardment
Ion implantation
Sputtering (Physics)
Surfaces (Technology)
Ionenimplantation (DE-588)4027606-5 gnd
Ionenbestrahlung (DE-588)4335201-7 gnd
Festkörperoberfläche (DE-588)4127823-9 gnd
Ionenstrahlätzen (DE-588)4162299-6 gnd
Sputtern (DE-588)4182614-0 gnd
subject_GND (DE-588)4027606-5
(DE-588)4335201-7
(DE-588)4127823-9
(DE-588)4162299-6
(DE-588)4182614-0
(DE-588)4143413-4
title Ion bombardment modification of surfaces fundamentals and applications
title_auth Ion bombardment modification of surfaces fundamentals and applications
title_exact_search Ion bombardment modification of surfaces fundamentals and applications
title_full Ion bombardment modification of surfaces fundamentals and applications ed. by Orlando Auciello
title_fullStr Ion bombardment modification of surfaces fundamentals and applications ed. by Orlando Auciello
title_full_unstemmed Ion bombardment modification of surfaces fundamentals and applications ed. by Orlando Auciello
title_short Ion bombardment modification of surfaces
title_sort ion bombardment modification of surfaces fundamentals and applications
title_sub fundamentals and applications
topic Bombardement ionique
Ions - Implantation
Pulvérisation cathodique
Surfaces (Technologie)
Ion bombardment
Ion implantation
Sputtering (Physics)
Surfaces (Technology)
Ionenimplantation (DE-588)4027606-5 gnd
Ionenbestrahlung (DE-588)4335201-7 gnd
Festkörperoberfläche (DE-588)4127823-9 gnd
Ionenstrahlätzen (DE-588)4162299-6 gnd
Sputtern (DE-588)4182614-0 gnd
topic_facet Bombardement ionique
Ions - Implantation
Pulvérisation cathodique
Surfaces (Technologie)
Ion bombardment
Ion implantation
Sputtering (Physics)
Surfaces (Technology)
Ionenimplantation
Ionenbestrahlung
Festkörperoberfläche
Ionenstrahlätzen
Sputtern
Aufsatzsammlung
volume_link (DE-604)BV001893966
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