Chemical vapor deposition for microelectronics principles, technology, and applications
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| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Park Ridge, NJ
Noyes Publ.
1987
|
| Schriftenreihe: | Materials science and process technology series.
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| Schlagworte: | |
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MARC
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| 245 | 1 | 0 | |a Chemical vapor deposition for microelectronics |b principles, technology, and applications |c by Arthur Sherman |
| 264 | 1 | |a Park Ridge, NJ |b Noyes Publ. |c 1987 | |
| 300 | |a XI, 215 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Materials science and process technology series. | |
| 500 | |a Literaturangaben | ||
| 650 | 4 | |a Integrated circuits |x Design and construction | |
| 650 | 4 | |a Vapor-plating | |
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| 650 | 0 | 7 | |a Elektronische Schaltung |0 (DE-588)4113419-9 |2 gnd |9 rswk-swf |
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Datensatz im Suchindex
| DE-BY-TUM_call_number | 0001/88 A 1853 |
|---|---|
| DE-BY-TUM_katkey | 234852 |
| DE-BY-TUM_media_number | 040000523248 |
| _version_ | 1816711375701934080 |
| any_adam_object | |
| author | Sherman, Arthur |
| author_facet | Sherman, Arthur |
| author_role | aut |
| author_sort | Sherman, Arthur |
| author_variant | a s as |
| building | Verbundindex |
| bvnumber | BV002067041 |
| callnumber-first | T - Technology |
| callnumber-label | TS695 |
| callnumber-raw | TS695 |
| callnumber-search | TS695 |
| callnumber-sort | TS 3695 |
| callnumber-subject | TS - Manufactures |
| classification_rvk | UP 7550 ZM 7680 |
| classification_tum | FER 820f ELT 279f |
| ctrlnum | (OCoLC)15657978 (DE-599)BVBBV002067041 |
| dewey-full | 621.381/7 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/7 |
| dewey-search | 621.381/7 |
| dewey-sort | 3621.381 17 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik Werkstoffwissenschaften / Fertigungstechnik |
| format | Book |
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| id | DE-604.BV002067041 |
| illustrated | Illustrated |
| indexdate | 2024-11-25T17:07:22Z |
| institution | BVB |
| isbn | 0815511361 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001351848 |
| oclc_num | 15657978 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-355 DE-BY-UBR DE-M347 DE-29T DE-384 DE-83 DE-11 DE-188 |
| owner_facet | DE-91 DE-BY-TUM DE-355 DE-BY-UBR DE-M347 DE-29T DE-384 DE-83 DE-11 DE-188 |
| physical | XI, 215 S. Ill., graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | Noyes Publ. |
| record_format | marc |
| series2 | Materials science and process technology series. |
| spellingShingle | Sherman, Arthur Chemical vapor deposition for microelectronics principles, technology, and applications Integrated circuits Design and construction Vapor-plating Mikroelektronik (DE-588)4039207-7 gnd CVD-Verfahren (DE-588)4009846-1 gnd Aufdampfen (DE-588)4143379-8 gnd Elektronische Schaltung (DE-588)4113419-9 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4009846-1 (DE-588)4143379-8 (DE-588)4113419-9 |
| title | Chemical vapor deposition for microelectronics principles, technology, and applications |
| title_auth | Chemical vapor deposition for microelectronics principles, technology, and applications |
| title_exact_search | Chemical vapor deposition for microelectronics principles, technology, and applications |
| title_full | Chemical vapor deposition for microelectronics principles, technology, and applications by Arthur Sherman |
| title_fullStr | Chemical vapor deposition for microelectronics principles, technology, and applications by Arthur Sherman |
| title_full_unstemmed | Chemical vapor deposition for microelectronics principles, technology, and applications by Arthur Sherman |
| title_short | Chemical vapor deposition for microelectronics |
| title_sort | chemical vapor deposition for microelectronics principles technology and applications |
| title_sub | principles, technology, and applications |
| topic | Integrated circuits Design and construction Vapor-plating Mikroelektronik (DE-588)4039207-7 gnd CVD-Verfahren (DE-588)4009846-1 gnd Aufdampfen (DE-588)4143379-8 gnd Elektronische Schaltung (DE-588)4113419-9 gnd |
| topic_facet | Integrated circuits Design and construction Vapor-plating Mikroelektronik CVD-Verfahren Aufdampfen Elektronische Schaltung |
| work_keys_str_mv | AT shermanarthur chemicalvapordepositionformicroelectronicsprinciplestechnologyandapplications |