Laser-induzierte Epitaxie und Defektnukleation in Silizium

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Bibliographische Detailangaben
1. Verfasser: Baumgart, Helmut (VerfasserIn)
Format: Abschlussarbeit Buch
Sprache:German
Veröffentlicht: 1981
Schlagworte:
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Datensatz im Suchindex

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physical 116 S. Ill. u. graph. Darst.
psigel TUB-nveb
publishDate 1981
publishDateSearch 1981
publishDateSort 1981
record_format marc
spellingShingle Baumgart, Helmut
Laser-induzierte Epitaxie und Defektnukleation in Silizium
Silicium (DE-588)4077445-4 gnd
Epitaxie (DE-588)4152545-0 gnd
subject_GND (DE-588)4077445-4
(DE-588)4152545-0
(DE-588)4113937-9
title Laser-induzierte Epitaxie und Defektnukleation in Silizium
title_auth Laser-induzierte Epitaxie und Defektnukleation in Silizium
title_exact_search Laser-induzierte Epitaxie und Defektnukleation in Silizium
title_full Laser-induzierte Epitaxie und Defektnukleation in Silizium
title_fullStr Laser-induzierte Epitaxie und Defektnukleation in Silizium
title_full_unstemmed Laser-induzierte Epitaxie und Defektnukleation in Silizium
title_short Laser-induzierte Epitaxie und Defektnukleation in Silizium
title_sort laser induzierte epitaxie und defektnukleation in silizium
topic Silicium (DE-588)4077445-4 gnd
Epitaxie (DE-588)4152545-0 gnd
topic_facet Silicium
Epitaxie
Hochschulschrift
work_keys_str_mv AT baumgarthelmut laserinduzierteepitaxieunddefektnukleationinsilizium