Highly Crystalline MoS2 Thin Films Fabricated by Sulfurization

The 2D transition metal dichalcogenides attract high research interest due to their electronic properties, and MoS2 is likely the most explored compound of this group. The fabrication of MoS2 thin films by the sulfurization of predeposited MoO3 layers on a c‐plane sapphire substrate by radio frequen...

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Veröffentlicht in:	physica status solidi (b) 2019-12, Vol.256 (12), p.n/a
Hauptverfasser:	Hutar, Peter, Spankova, Marianna, Sojkova, Michaela, Dobrocka, Edmund, Vegso, Karol, Hagara, Jakub, Halahovets, Yuriy, Majkova, Eva, Siffalovic, Peter, Hulman, Martin
Format:	Artikel
Sprache:	eng
Schlagworte:	film texture molybdenum disulfide molybdenum oxide sulfurization thin films
Online-Zugang:	Volltext
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