Advanced Dielectric Materials (Polyimides and Polybenzoxazoles) for Fan‐Out Wafer‐Level Packaging (FO‐WLP)
This chapter provides an overview of advanced dielectric materials developed by HD Micro Systems (HDM) that are based on polyimide (PI) and polybenzo‐xazole (PBO) technologies and that are targeted for use as redistribution layers (RDL) in fan‐out wafer‐level package (FO‐WLP) applications where lith...
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