X-RAY-DIFFRACTION ANALYSIS OF SI1-XGEX/SI SUPERLATTICES

Si1-xGex/Si strained-layer superlattices grown by molecular-beam epitaxy on Si substrates were investigated by x-ray double-crystal diffraction and x-ray grazing incidence diffraction. Both coherent and incoherent interfaces between the two components of the superlattices were observed. By fitting c...

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Veröffentlicht in:	Journal of applied physics 1992-10, Vol.72 (8), p.3474-3479
Hauptverfasser:	MAI, ZH, OUYANG, JT, CUI, SF, LI, JH, WANG, CY, LI, CR
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties Physical Sciences Physics Physics, Applied Science & Technology Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
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