Electron backscattering coefficients of molybdenum and tungsten based on the Monte Carlo simulations

Monte Carlo simulation is employed for the calculation of electron backscattering coefficients of molybdenum (Mo) and tungsten (W) at normal incidence angle and at energies between 100 eV to 100 keV. For the modelling of the electron elastic scattering we have applied the partial-wave expansion method using the Mott's cross-section, where the scattering potential includes the electron electrostatic potential, exchange potential and correlation-polarization potential. A relativistic dielectric functional approach with full Penn's algorithm is adopted for the calculation of the electron inelastic cross-section. The effect of phonon excitation, the interband transition of the loosely bound valance electrons, and the inner-shells electrons excitations are considered in the energy loss functions of the materials via the optical constants. We found that our present simulated data agree well with the experimental data at energies above 20 keV for both elements while they are well above the experimental data at lower incident energies. The disagreement can be explained by the possible surface contamination of carbonaceous atomic layers exist in the measurements by additional simulation for the contaminated surfaces. Moreover, for the better and detailed understanding of the energy dependence of the backscattering coefficients, we also present the backscattered electron energy spectra, angular distributions, and depth distributions for both samples.