THz-TDS Reflection Measurement of Coating Thicknesses at Non-Perpendicular Incidence: Experiment and Simulation
Time-domain spectroscopy (TDS) in the terahertz (THz) frequency range is gaining in importance in nondestructive testing of dielectric materials. One application is the layer thickness measurement of a coating layer. To determine the thickness from the measurement data, the refractive index of the c...
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| Veröffentlicht in: | Sensors (Basel, Switzerland) Switzerland), 2021-05, Vol.21 (10), p.3473, Article 3473 |
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| creator | Burger, Ruben Frisch, Julia Huebner, Matthias Goldammer, Matthias Peters, Ole Roenneberg, Enno Wu, Datong |
| description | Time-domain spectroscopy (TDS) in the terahertz (THz) frequency range is gaining in importance in nondestructive testing of dielectric materials. One application is the layer thickness measurement of a coating layer. To determine the thickness from the measurement data, the refractive index of the coating layer must be known in the surveyed frequency range. For perpendicular incidence of the radiation, methods exist to extract the refractive index from the measurement data themselves without prior knowledge. This paper extends these methods for non-perpendicular incidence, where the polarization of the radiation becomes important. Furthermore, modifications considering effects of surface roughness of the coating are introduced. The new methods are verified using measurement data of a sample of Inconel steel coated with yttria-stabilized zirconia (YSZ) and with COMSOL simulations of the measurement setup. To validate the thickness measurements, scanning electron microscopy (SEM) images of the layer structure are used. The results show good agreement with an average error of 1% for the simulation data and under 4% for the experimental data compared to reference measurements. |
| doi_str_mv | 10.3390/s21103473 |
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One application is the layer thickness measurement of a coating layer. To determine the thickness from the measurement data, the refractive index of the coating layer must be known in the surveyed frequency range. For perpendicular incidence of the radiation, methods exist to extract the refractive index from the measurement data themselves without prior knowledge. This paper extends these methods for non-perpendicular incidence, where the polarization of the radiation becomes important. Furthermore, modifications considering effects of surface roughness of the coating are introduced. The new methods are verified using measurement data of a sample of Inconel steel coated with yttria-stabilized zirconia (YSZ) and with COMSOL simulations of the measurement setup. To validate the thickness measurements, scanning electron microscopy (SEM) images of the layer structure are used. The results show good agreement with an average error of 1% for the simulation data and under 4% for the experimental data compared to reference measurements.</description><identifier>ISSN: 1424-8220</identifier><identifier>EISSN: 1424-8220</identifier><identifier>DOI: 10.3390/s21103473</identifier><identifier>PMID: 34065760</identifier><language>eng</language><publisher>BASEL: Mdpi</publisher><subject>Chemistry ; Chemistry, Analytical ; Coating ; Dielectrics ; Engineering ; Engineering, Electrical & Electronic ; Frequency ranges ; Gas turbine engines ; Instruments & Instrumentation ; Interfaces ; layer thickness measurement ; nondestructive evaluation ; Nondestructive testing ; Physical Sciences ; porosity ; Protective coatings ; Radiation ; Refractivity ; Science & Technology ; Simulation ; Spectrum analysis ; Surface roughness ; Surface roughness effects ; Technology ; thermal barrier coatings ; Thickness measurement ; THz time-domain spectroscopy ; Yttria-stabilized zirconia ; Yttrium oxide ; Zirconium dioxide</subject><ispartof>Sensors (Basel, Switzerland), 2021-05, Vol.21 (10), p.3473, Article 3473</ispartof><rights>2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). 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One application is the layer thickness measurement of a coating layer. To determine the thickness from the measurement data, the refractive index of the coating layer must be known in the surveyed frequency range. For perpendicular incidence of the radiation, methods exist to extract the refractive index from the measurement data themselves without prior knowledge. This paper extends these methods for non-perpendicular incidence, where the polarization of the radiation becomes important. Furthermore, modifications considering effects of surface roughness of the coating are introduced. The new methods are verified using measurement data of a sample of Inconel steel coated with yttria-stabilized zirconia (YSZ) and with COMSOL simulations of the measurement setup. To validate the thickness measurements, scanning electron microscopy (SEM) images of the layer structure are used. 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| subjects | Chemistry Chemistry, Analytical Coating Dielectrics Engineering Engineering, Electrical & Electronic Frequency ranges Gas turbine engines Instruments & Instrumentation Interfaces layer thickness measurement nondestructive evaluation Nondestructive testing Physical Sciences porosity Protective coatings Radiation Refractivity Science & Technology Simulation Spectrum analysis Surface roughness Surface roughness effects Technology thermal barrier coatings Thickness measurement THz time-domain spectroscopy Yttria-stabilized zirconia Yttrium oxide Zirconium dioxide |
| title | THz-TDS Reflection Measurement of Coating Thicknesses at Non-Perpendicular Incidence: Experiment and Simulation |
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