Investigation and Evaluation of Solid-State Marx Pulse Generator Based on 3-D Busbar

SiC-MOSFET has been widely used in nanosecond pulse power generators due to its excellent switching characteristics. The solid-state Marx generator using SiC-MOSFET has the advantages of modularity, flexible adjustment, and economic reliability. However, due to the limitation of the busbar loop'...

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Veröffentlicht in:IEEE transactions on plasma science 2021-05, Vol.49 (5), p.1597-1604
Hauptverfasser: Ma, Jianhao, Yu, Liang, Sun, Wenjie, Dong, Shoulong, Gao, Liangxi, Yao, Chenguo
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container_issue 5
container_start_page 1597
container_title IEEE transactions on plasma science
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creator Ma, Jianhao
Yu, Liang
Sun, Wenjie
Dong, Shoulong
Gao, Liangxi
Yao, Chenguo
description SiC-MOSFET has been widely used in nanosecond pulse power generators due to its excellent switching characteristics. The solid-state Marx generator using SiC-MOSFET has the advantages of modularity, flexible adjustment, and economic reliability. However, due to the limitation of the busbar loop's parasitic inductance, the excellent switching characteristics of SiC-MOSFETs have not yet been fully utilized in solid-state Marx. This article discusses the PCB wiring structure of the single-module of solid-state Marx and the influence of its superimposed spatial distribution parameters on the output pulse waveform. The principle of 3-D busbar structure and mutual inductance cancellation method to reduce the parasitic inductance of pulse busbar loop is proposed. And verify the above principle through electromagnetic simulation and four-stage superposition experiment. The parasitic inductance of the busbar loop is less than 4 nH. The voltage edge of the output pulse is further reduced, the current rise/fall speed is increased by about 2.3 times, and the switching voltage overshoot is reduced by 80%. And the proposed structure effectively suppresses the gate bounce and improves the solid-state Marx pulse characteristics. Finally, the stability and reliability of the system are improved too.
doi_str_mv 10.1109/TPS.2021.3073489
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subjects 3-D busbar
Busbars
Discharges (electric)
Electric potential
Generators
Inductance
Layout
Marx generators
Modularity
MOSFETs
nanosecond pulse generator
Nanosecond pulses
Parasitics (electronics)
PCB
Physical Sciences
Physics
Physics, Fluids & Plasmas
Polychlorinated biphenyls
Pulse generation
Pulse generators
Science & Technology
SiC-MOSFET
Solid state
solid-state Marx
Spatial distribution
Switches
Switching
Voltage
Waveforms
Wiring
title Investigation and Evaluation of Solid-State Marx Pulse Generator Based on 3-D Busbar
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