Manufacturing of a microlens array mold by a two-step method combining microindentation and precision polishing

A novel two-step method for manufacturing microlens array molds by combining microindentation and precision polishing is proposed. Compared with conventional manufacturing methods, such as single-point diamond turning, this two-step method, as an alternative method, presents great advantages on cost...

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Veröffentlicht in:Applied optics (2004) 2020-08, Vol.59 (23), p.6945-6952
Hauptverfasser: Zhang, Lin, Yi, Allen Y.
Format: Artikel
Sprache:eng
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