Exploring Strategies to Contact 3D Nano-Pillars

This contribution explores different strategies to electrically contact vertical pillars with diameters less than 100 nm. Two process strategies have been defined, the first based on Atomic Force Microscope (AFM) indentation and the second based on planarization and reactive ion etching (RIE). We ha...

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Veröffentlicht in:	Nanomaterials (Basel, Switzerland) Switzerland), 2020-04, Vol.10 (4), p.716
Hauptverfasser:	Amat, Esteve, Del Moral, Alberto, Fernández-Regúlez, Marta, Evangelio, Laura, Lorenzoni, Matteo, Gharbi, Ahmed, Rademaker, Guido, Pourteau, Marie-Line, Tiron, Raluca, Bausells, Joan, Perez-Murano, Francesc
Format:	Artikel
Sprache:	eng
Schlagworte:	AFM Annealing Atomic force microscopes Atomic force microscopy Chemical-mechanical polishing Electric contacts Etching HSQ Indentation Integrated circuits Manufacturing Manufacturing industry nano-indentation Nanocrystals Nanowires Quantum dots Reactive ion etching Transistors vertical pillars
Online-Zugang:	Volltext
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