Stress-induced change of Cu-doped Bi2Te3 thin films for flexible thermoelectric applications

[Display omitted] •Cu-doped Bi2Te3 thin films were deposited by magnetron sputtering.•The substrates were used with the Si wafer, glass, and polyimide.•The characteristics of films were different with each other.•The influence of thermal stress in Cu-doped Bi2Te3 thin films was investigated. Cu-dope...

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Veröffentlicht in:Materials letters 2020-07, Vol.270, p.127697, Article 127697
Hauptverfasser: Geun Kim, Byeong, Hyun Bae, Sang, Byeon, Jihyeon, Lee, Chun, Choi, Soon-Mok
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Byeon, Jihyeon
Lee, Chun
Choi, Soon-Mok
description [Display omitted] •Cu-doped Bi2Te3 thin films were deposited by magnetron sputtering.•The substrates were used with the Si wafer, glass, and polyimide.•The characteristics of films were different with each other.•The influence of thermal stress in Cu-doped Bi2Te3 thin films was investigated. Cu-doped Bi2Te3 thin films were deposited on Si wafer, glass, and polyimide substrates at 200 °C using magnetron sputtering. During the deposition process, it is confirmed that thermal stress occurred at the films due to the mismatch of the coefficient of thermal expansion between the films and the substrates. As substrates with different coefficients of thermal expansion were used, the changes of crystal growth, morphologies, and thermoelectric properties of the Cu-doped Bi2Te3 thin films were investigated.
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subjects Bi2Te3
Bismuth tellurides
Crystal growth
Flexible
Glass substrates
Magnetron sputtering
Materials Science
Materials Science, Multidisciplinary
Morphology
Physical Sciences
Physics
Physics, Applied
Polyimide
Science & Technology
Sputtering
Substrates
Technology
Thermal expansion
Thermal stress
Thermoelectric
Thermoelectricity
Thin films
title Stress-induced change of Cu-doped Bi2Te3 thin films for flexible thermoelectric applications
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