Surface morphology and photoluminescence properties of ZnO thin films obtained by PLD

ZnO thin films on Si(111) substrate were deposited by laser ablation of Zn target in oxygen reactive atmosphere, Nd-YAG laser with wavelength of 1 064 nm was used as laser source. XRD and FESEM microscopy were applied to characterize the structure and surface morphology of the deposited ZnO films. T...

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Veröffentlicht in:	Transactions of Nonferrous Metals Society of China 2005-06, Vol.15 (3), p.519-523
1. Verfasser:	连建设 郭作兴 蒋青
Format:	Artikel
Sprache:	eng
Schlagworte:	UV光致发光 氧化锌 脉冲激光沉积 薄膜生长
Online-Zugang:	Volltext
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