Formation and Characterization of Pd, Pt and Pd-Pt Alloy Films on Polyimide by Catalyst-Enhanced Chemical Vapor Deposition

Platinum, palladium and their alloy films on polyimide were formed by catalyst-enhanced chemical vapor deposition （CVD） in the carrier gas （N2, O2） at 220-300℃ under reduced pressure and normal pressure. The deposition of palladium complexes [ Pd（（η3-allyl）（hfac） and Pd（hfac）2 ] gives pure palladium...

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Veröffentlicht in:	Journal of Wuhan University of Technology. Materials science edition 2007-02, Vol.22 (1), p.161-164
Hauptverfasser:	Zhou, Jinlan, Cheng, Yinhua, Yousuf, Hamadan, Yu, Kaichao
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition Platinum 催化剂增强化学汽相沉积 聚酰亚胺 薄膜形成 钯-铂合金膜
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