Effects of Different Titanium Sub-oxide on the Properties of Titanium Dioxide Thin Films Prepared by E-beam Evaporation Deposition with Ion Auxiliary
TiO2 thin films were prepared with Ti2O3, Ti3O5 and TiO2 as raw materials, by electron-beam evaporation deposition, using O^2- ion beam （ O2 purity up to 99.99% ） as auxiliary means. The crystal structures of the samples were inspected by the X-ray diffraction （XRD） method, and the evaporation chara...
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| Veröffentlicht in: | Journal of Wuhan University of Technology. Materials science edition 2006-06, Vol.21 (2), p.101-104 |
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| container_title | Journal of Wuhan University of Technology. Materials science edition |
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| creator | Aiyun, Guo Yiyu, Xue Xuanmin, Zhu Guangyong, Zhang Peitao, Guo Xiaofeng, Hu |
| description | TiO2 thin films were prepared with Ti2O3, Ti3O5 and TiO2 as raw materials, by electron-beam evaporation deposition, using O^2- ion beam （ O2 purity up to 99.99% ） as auxiliary means. The crystal structures of the samples were inspected by the X-ray diffraction （XRD） method, and the evaporation character of warious raw materials was analyzed. Transmittance spectra were measured through a U-3310 spectrophotometer （ wavelength ranging from 200 nm to 900 nm）. The refractive index n and the thickness of films were determined from transmission spectra. The experimental results show that the thin films taking Ti2O3 as their raw material have a strong absorption, when taking Ti3O5 and TiO2 as raw materials, the thin films would have good optical properties. The experiments also show that, the crystal structure of all thin films is amorphous before post-annealing and the Ti3O5 is a congruent evaporation phase in the Ti-O system. |
| doi_str_mv | 10.1007/bf02840851 |
| format | Article |
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The crystal structures of the samples were inspected by the X-ray diffraction （XRD） method, and the evaporation character of warious raw materials was analyzed. Transmittance spectra were measured through a U-3310 spectrophotometer （ wavelength ranging from 200 nm to 900 nm）. The refractive index n and the thickness of films were determined from transmission spectra. The experimental results show that the thin films taking Ti2O3 as their raw material have a strong absorption, when taking Ti3O5 and TiO2 as raw materials, the thin films would have good optical properties. The experiments also show that, the crystal structure of all thin films is amorphous before post-annealing and the Ti3O5 is a congruent evaporation phase in the Ti-O system.</description><identifier>ISSN: 1000-2413</identifier><identifier>EISSN: 1993-0437</identifier><identifier>DOI: 10.1007/bf02840851</identifier><language>eng</language><publisher>Wuhan: Springer Nature B.V</publisher><subject>Crystal structure ; Deposition ; Electron beams ; Evaporation ; Ion beams ; Optical properties ; Raw materials ; Refractivity ; Spectra ; Studies ; Thickness ; Thin films ; Titanium dioxide ; Titanium oxides ; 二氧化钛薄膜 ; 电子束蒸发法 ; 离子辅助淀积</subject><ispartof>Journal of Wuhan University of Technology. Materials science edition, 2006-06, Vol.21 (2), p.101-104</ispartof><rights>Wuhan University of Technology 2006</rights><rights>Editorial Office of Journal of Wuhan University of Technology-Materials Science Edition 2005.</rights><rights>Copyright © Wanfang Data Co. Ltd. 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The experiments also show that, the crystal structure of all thin films is amorphous before post-annealing and the Ti3O5 is a congruent evaporation phase in the Ti-O system.</description><subject>Crystal structure</subject><subject>Deposition</subject><subject>Electron beams</subject><subject>Evaporation</subject><subject>Ion beams</subject><subject>Optical properties</subject><subject>Raw materials</subject><subject>Refractivity</subject><subject>Spectra</subject><subject>Studies</subject><subject>Thickness</subject><subject>Thin films</subject><subject>Titanium dioxide</subject><subject>Titanium oxides</subject><subject>二氧化钛薄膜</subject><subject>电子束蒸发法</subject><subject>离子辅助淀积</subject><issn>1000-2413</issn><issn>1993-0437</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><sourceid>AFKRA</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><recordid>eNp90c1u1DAUBeAIgUQpbHgCCyQWoMD1T-Jk2XZmSqVKIDGsLdtzM3FJ4tROmJkH4X3rdkoXLFj5LD4fy_dm2VsKnymA_GIaYJWAqqDPshNa1zwHweXzlAEgZ4Lyl9mrGG8ABPCyPMn-LJsG7RSJb8jCpRxwmMjaTXpwc09-zCb3e7dB4gcytUi-Bz9imBw-3HhyC3dU69YNZOW6PiaJow64IeZAlrlB3ZPlbz36oCeXyhY4-uge4s5NLblK4Wzeu87pcHidvWh0F_HN43ma_Vwt1xdf8-tvl1cXZ9e55RWdclrqShqDxkjLBAew0lAtKl1yaylliEUpS2PLWnI0wArkhiNjVjKKkNRp9unYu9NDo4etuvFzGNKLatduD5v93ihkACUwYPf6w1GPwd_OGCfVu2ix6_SAfo6K1QIkcJng-3_gUy-TVVkLKoD9T1FKOWeSijqpj0dlg48xYKPG4Po0I0VB3e9cna_-7jzhd4-49cP21qUfGW1_Na5DxRgVRVEW_A5ggKlg</recordid><startdate>20060601</startdate><enddate>20060601</enddate><creator>Aiyun, Guo</creator><creator>Yiyu, Xue</creator><creator>Xuanmin, Zhu</creator><creator>Guangyong, Zhang</creator><creator>Peitao, Guo</creator><creator>Xiaofeng, Hu</creator><general>Springer Nature B.V</general><general>School of Materials Science and Engineering, Wuhan University of Technology, Wuhan 430070, China</general><scope>2RA</scope><scope>92L</scope><scope>CQIGP</scope><scope>W92</scope><scope>~WA</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8AO</scope><scope>8BQ</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>AFKRA</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>JG9</scope><scope>KB.</scope><scope>PDBOC</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>2B.</scope><scope>4A8</scope><scope>92I</scope><scope>93N</scope><scope>PSX</scope><scope>TCJ</scope></search><sort><creationdate>20060601</creationdate><title>Effects of Different Titanium Sub-oxide on the Properties of Titanium Dioxide Thin Films Prepared by E-beam Evaporation Deposition with Ion Auxiliary</title><author>Aiyun, Guo ; 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Materials science edition</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Aiyun, Guo</au><au>Yiyu, Xue</au><au>Xuanmin, Zhu</au><au>Guangyong, Zhang</au><au>Peitao, Guo</au><au>Xiaofeng, Hu</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Effects of Different Titanium Sub-oxide on the Properties of Titanium Dioxide Thin Films Prepared by E-beam Evaporation Deposition with Ion Auxiliary</atitle><jtitle>Journal of Wuhan University of Technology. Materials science edition</jtitle><addtitle>Journal of Wuhan University of Technology. 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| ispartof | Journal of Wuhan University of Technology. Materials science edition, 2006-06, Vol.21 (2), p.101-104 |
| issn | 1000-2413 1993-0437 |
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| source | SpringerNature Journals; Alma/SFX Local Collection |
| subjects | Crystal structure Deposition Electron beams Evaporation Ion beams Optical properties Raw materials Refractivity Spectra Studies Thickness Thin films Titanium dioxide Titanium oxides 二氧化钛薄膜 电子束蒸发法 离子辅助淀积 |
| title | Effects of Different Titanium Sub-oxide on the Properties of Titanium Dioxide Thin Films Prepared by E-beam Evaporation Deposition with Ion Auxiliary |
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