Electrode design for multimode suppression of aluminum nitride tuning fork resonators

This paper is focused on electrode design for piezoelectric tuning fork resonators. The relationship between the performance and electrode pattern of aluminum nitride piezoelectric tuning fork resonators vibrating in the in-plane flexural mode is investigated based on a set of resonators with differ...

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Veröffentlicht in:	Nanotechnology and Precision Engineering 2023-12, Vol.6 (4), p.11-21
Hauptverfasser:	Yuan, Yi, Yang, Qingrui, Li, Haolin, Shi, Shuai, Niu, Pengfei, Sun, Chongling, Liu, Bohua, Zhang, Menglun, Pang, Wei
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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