Subsurface Damage of Monocrystalline Germanium Wafers by Fixed and Free Abrasive Lappings

The subsurface damage （SSD） layers of monocrystalline germanium wafers lapped by three different ways were measured and compared by the method of nanoindentation and micro morphology. Three ways such as ice-fixed abrasive, thermosetting fixed abrasive and free abrasive lappings are adopted to lap mo...

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Veröffentlicht in:	南京航空航天大学学报（英文版） 2017-10, Vol.34 (5), p.496-503
Hauptverfasser:	Tang Suyang, Sun Yuli, Wang gong, Li Jun, Xu gang, Liu Zhigang, Zhu Yongwei, Zuo Dunwen
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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