Subsurface Damage of Monocrystalline Germanium Wafers by Fixed and Free Abrasive Lappings

Subsurface Damage of Monocrystalline Germanium Wafers by Fixed and Free Abrasive Lappings

The subsurface damage （SSD） layers of monocrystalline germanium wafers lapped by three different ways were measured and compared by the method of nanoindentation and micro morphology. Three ways such as ice-fixed abrasive, thermosetting fixed abrasive and free abrasive lappings are adopted to lap mo...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:南京航空航天大学学报（英文版） 2017-10, Vol.34 (5), p.496-503
Hauptverfasser: Tang Suyang, Sun Yuli, Wang gong, Li Jun, Xu gang, Liu Zhigang, Zhu Yongwei, Zuo Dunwen
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 503
container_issue 5
container_start_page 496
container_title 南京航空航天大学学报（英文版）
container_volume 34
creator Tang Suyang
Sun Yuli
Wang gong
Li Jun
Xu gang
Liu Zhigang
Zhu Yongwei
Zuo Dunwen
description The subsurface damage （SSD） layers of monocrystalline germanium wafers lapped by three different ways were measured and compared by the method of nanoindentation and micro morphology. Three ways such as ice-fixed abrasive, thermosetting fixed abrasive and free abrasive lappings are adopted to lap monocrystalline ger manium wafers. The SSD depth was measured by a nanoindenter, and the morphology of SSD layer was observed by an atomic force microscopy（AFM）. The results show that the SSD layer of monocrystalline germanium wafer is mainly composed of soft corrosion layer and plastic scratch and crack growth layer. Compared with thermosetting fixed abrasive and free abrasive lappings, the SSD depth lapped with ice fixed abrasive is shallower. Moreover, the SSD morphology of monocrystalline germanium wafer lapped with ice fixed abrasive is superior to those of two oth- er processing ways.
format Article
fullrecord <record><control><sourceid>wanfang_jour_chong</sourceid><recordid>TN_cdi_wanfang_journals_njhkhtdxxb_e201705004</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><cqvip_id>673854096</cqvip_id><wanfj_id>njhkhtdxxb_e201705004</wanfj_id><sourcerecordid>njhkhtdxxb_e201705004</sourcerecordid><originalsourceid>FETCH-LOGICAL-c1354-93465cc77a973b9cb1ad39a48037ead7415578a0c7456964154767c6bca9523a3</originalsourceid><addsrcrecordid>eNotjl1LwzAYhXuh4Jj7D8H7QrJ8NZdj2ilUvFARr8qbNO0y27Qmq7b_3sK8Ohx4OOe5SlYEY54SssU3ySZGpzEWElOZiVXy-TrqOIYajEX30EFjUV-j5973JszxDG3rvEUHGzrwbuzQB9Q2RKRnlLvJVgh8hfJgLdrpANH9WFTAMDjfxNvkuoY22s1_rpP3_OFt_5gWL4en_a5IDaGcpYoywY2REpSkWhlNoKIKWLYIWqgkI5zLDLCRjAsllsqkkEZoA4pvKdB1kl52f8HX4Jvy1I_BL4-lPx2_judqmnRpt5hIzDFmC3934c2x9833oloOwXUQ5lJImnGGlaB_dZ1cQA</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Subsurface Damage of Monocrystalline Germanium Wafers by Fixed and Free Abrasive Lappings</title><source>Alma/SFX Local Collection</source><creator>Tang Suyang;Sun Yuli;Wang gong;Li Jun;Xu gang;Liu Zhigang;Zhu Yongwei;Zuo Dunwen</creator><creatorcontrib>Tang Suyang;Sun Yuli;Wang gong;Li Jun;Xu gang;Liu Zhigang;Zhu Yongwei;Zuo Dunwen</creatorcontrib><description>The subsurface damage （SSD） layers of monocrystalline germanium wafers lapped by three different ways were measured and compared by the method of nanoindentation and micro morphology. Three ways such as ice-fixed abrasive, thermosetting fixed abrasive and free abrasive lappings are adopted to lap monocrystalline ger manium wafers. The SSD depth was measured by a nanoindenter, and the morphology of SSD layer was observed by an atomic force microscopy（AFM）. The results show that the SSD layer of monocrystalline germanium wafer is mainly composed of soft corrosion layer and plastic scratch and crack growth layer. Compared with thermosetting fixed abrasive and free abrasive lappings, the SSD depth lapped with ice fixed abrasive is shallower. Moreover, the SSD morphology of monocrystalline germanium wafer lapped with ice fixed abrasive is superior to those of two oth- er processing ways.</description><identifier>ISSN: 1005-1120</identifier><language>eng</language><publisher>College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,P.R.China</publisher><ispartof>南京航空航天大学学报（英文版）, 2017-10, Vol.34 (5), p.496-503</ispartof><rights>Copyright © Wanfang Data Co. Ltd. All Rights Reserved.</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttp://image.cqvip.com/vip1000/qk/85388X/85388X.jpg</thumbnail><link.rule.ids>314,780,784</link.rule.ids></links><search><creatorcontrib>Tang Suyang;Sun Yuli;Wang gong;Li Jun;Xu gang;Liu Zhigang;Zhu Yongwei;Zuo Dunwen</creatorcontrib><title>Subsurface Damage of Monocrystalline Germanium Wafers by Fixed and Free Abrasive Lappings</title><title>南京航空航天大学学报（英文版）</title><addtitle>Transactions of Nanjing University of Aeronautics ＆ Astronautics</addtitle><description>The subsurface damage （SSD） layers of monocrystalline germanium wafers lapped by three different ways were measured and compared by the method of nanoindentation and micro morphology. Three ways such as ice-fixed abrasive, thermosetting fixed abrasive and free abrasive lappings are adopted to lap monocrystalline ger manium wafers. The SSD depth was measured by a nanoindenter, and the morphology of SSD layer was observed by an atomic force microscopy（AFM）. The results show that the SSD layer of monocrystalline germanium wafer is mainly composed of soft corrosion layer and plastic scratch and crack growth layer. Compared with thermosetting fixed abrasive and free abrasive lappings, the SSD depth lapped with ice fixed abrasive is shallower. Moreover, the SSD morphology of monocrystalline germanium wafer lapped with ice fixed abrasive is superior to those of two oth- er processing ways.</description><issn>1005-1120</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><recordid>eNotjl1LwzAYhXuh4Jj7D8H7QrJ8NZdj2ilUvFARr8qbNO0y27Qmq7b_3sK8Ohx4OOe5SlYEY54SssU3ySZGpzEWElOZiVXy-TrqOIYajEX30EFjUV-j5973JszxDG3rvEUHGzrwbuzQB9Q2RKRnlLvJVgh8hfJgLdrpANH9WFTAMDjfxNvkuoY22s1_rpP3_OFt_5gWL4en_a5IDaGcpYoywY2REpSkWhlNoKIKWLYIWqgkI5zLDLCRjAsllsqkkEZoA4pvKdB1kl52f8HX4Jvy1I_BL4-lPx2_judqmnRpt5hIzDFmC3934c2x9833oloOwXUQ5lJImnGGlaB_dZ1cQA</recordid><startdate>20171001</startdate><enddate>20171001</enddate><creator>Tang Suyang;Sun Yuli;Wang gong;Li Jun;Xu gang;Liu Zhigang;Zhu Yongwei;Zuo Dunwen</creator><general>College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,P.R.China</general><scope>2RA</scope><scope>92L</scope><scope>CQIGP</scope><scope>W92</scope><scope>~WA</scope><scope>2B.</scope><scope>4A8</scope><scope>92I</scope><scope>93N</scope><scope>PSX</scope><scope>TCJ</scope></search><sort><creationdate>20171001</creationdate><title>Subsurface Damage of Monocrystalline Germanium Wafers by Fixed and Free Abrasive Lappings</title><author>Tang Suyang;Sun Yuli;Wang gong;Li Jun;Xu gang;Liu Zhigang;Zhu Yongwei;Zuo Dunwen</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c1354-93465cc77a973b9cb1ad39a48037ead7415578a0c7456964154767c6bca9523a3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Tang Suyang;Sun Yuli;Wang gong;Li Jun;Xu gang;Liu Zhigang;Zhu Yongwei;Zuo Dunwen</creatorcontrib><collection>中文科技期刊数据库</collection><collection>中文科技期刊数据库-CALIS站点</collection><collection>中文科技期刊数据库-7.0平台</collection><collection>中文科技期刊数据库-工程技术</collection><collection>中文科技期刊数据库- 镜像站点</collection><collection>Wanfang Data Journals - Hong Kong</collection><collection>WANFANG Data Centre</collection><collection>Wanfang Data Journals</collection><collection>万方数据期刊 - 香港版</collection><collection>China Online Journals (COJ)</collection><collection>China Online Journals (COJ)</collection><jtitle>南京航空航天大学学报（英文版）</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Tang Suyang;Sun Yuli;Wang gong;Li Jun;Xu gang;Liu Zhigang;Zhu Yongwei;Zuo Dunwen</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Subsurface Damage of Monocrystalline Germanium Wafers by Fixed and Free Abrasive Lappings</atitle><jtitle>南京航空航天大学学报（英文版）</jtitle><addtitle>Transactions of Nanjing University of Aeronautics ＆ Astronautics</addtitle><date>2017-10-01</date><risdate>2017</risdate><volume>34</volume><issue>5</issue><spage>496</spage><epage>503</epage><pages>496-503</pages><issn>1005-1120</issn><abstract>The subsurface damage （SSD） layers of monocrystalline germanium wafers lapped by three different ways were measured and compared by the method of nanoindentation and micro morphology. Three ways such as ice-fixed abrasive, thermosetting fixed abrasive and free abrasive lappings are adopted to lap monocrystalline ger manium wafers. The SSD depth was measured by a nanoindenter, and the morphology of SSD layer was observed by an atomic force microscopy（AFM）. The results show that the SSD layer of monocrystalline germanium wafer is mainly composed of soft corrosion layer and plastic scratch and crack growth layer. Compared with thermosetting fixed abrasive and free abrasive lappings, the SSD depth lapped with ice fixed abrasive is shallower. Moreover, the SSD morphology of monocrystalline germanium wafer lapped with ice fixed abrasive is superior to those of two oth- er processing ways.</abstract><pub>College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,P.R.China</pub><tpages>8</tpages></addata></record>
fulltext fulltext
identifier ISSN: 1005-1120
ispartof 南京航空航天大学学报（英文版）, 2017-10, Vol.34 (5), p.496-503
issn 1005-1120
language eng
recordid cdi_wanfang_journals_njhkhtdxxb_e201705004
source Alma/SFX Local Collection
title Subsurface Damage of Monocrystalline Germanium Wafers by Fixed and Free Abrasive Lappings
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-01T02%3A56%3A21IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-wanfang_jour_chong&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Subsurface%20Damage%20of%20Monocrystalline%20Germanium%20Wafers%20by%20Fixed%20and%20Free%20Abrasive%20Lappings&rft.jtitle=%E5%8D%97%E4%BA%AC%E8%88%AA%E7%A9%BA%E8%88%AA%E5%A4%A9%E5%A4%A7%E5%AD%A6%E5%AD%A6%E6%8A%A5%EF%BC%88%E8%8B%B1%E6%96%87%E7%89%88%EF%BC%89&rft.au=Tang%20Suyang;Sun%20Yuli;Wang%20gong;Li%20Jun;Xu%20gang;Liu%20Zhigang;Zhu%20Yongwei;Zuo%20Dunwen&rft.date=2017-10-01&rft.volume=34&rft.issue=5&rft.spage=496&rft.epage=503&rft.pages=496-503&rft.issn=1005-1120&rft_id=info:doi/&rft_dat=%3Cwanfang_jour_chong%3Enjhkhtdxxb_e201705004%3C/wanfang_jour_chong%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_cqvip_id=673854096&rft_wanfj_id=njhkhtdxxb_e201705004&rfr_iscdi=true