Real-time OHT Dispatching Mechanism for the Interbay Automated Material Handling System with Shortcuts and Bypasses
As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has received much attention. This problem is first formu- lated as a special form of assig...
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| Veröffentlicht in: | Chinese journal of mechanical engineering 2017-05, Vol.30 (3), p.663-675 |
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| creator | PAN, Cong ZHANG, Jie QIN, Wei |
| description | As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has received much attention. This problem is first formu- lated as a special form of assignment problem and it is proved that more than one solution will be obtained by Hungarian algorithm simultaneously. Through proposing and strictly proving two propositions related to the char- acteristics of these solutions, a modified Hungarian algo- rithm is designed to distinguish these solutions. Finally, a new real-time OHT dispatching method is carefully designed by implementing the solution obtained by the modified Hungarian algorithm. The experimental results of discrete event simulations show that, compared with con- ventional Hungarian algorithm dispatching method, the proposed dispatching method that chooses the solution with the maximum variance respectively reduces on average 4 s of the average waiting time and average lead time of wafer lots, and its performance is rather stable in multiple dif- ferent scenarios of the interbay AMHS with different quantities of shortcuts. This research provides an efficient real-time OHT dispatching mechanism for the interbay AMHS with shortcuts and bypasses. |
| doi_str_mv | 10.1007/s10033-017-0100-x |
| format | Article |
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This problem is first formu- lated as a special form of assignment problem and it is proved that more than one solution will be obtained by Hungarian algorithm simultaneously. Through proposing and strictly proving two propositions related to the char- acteristics of these solutions, a modified Hungarian algo- rithm is designed to distinguish these solutions. Finally, a new real-time OHT dispatching method is carefully designed by implementing the solution obtained by the modified Hungarian algorithm. The experimental results of discrete event simulations show that, compared with con- ventional Hungarian algorithm dispatching method, the proposed dispatching method that chooses the solution with the maximum variance respectively reduces on average 4 s of the average waiting time and average lead time of wafer lots, and its performance is rather stable in multiple dif- ferent scenarios of the interbay AMHS with different quantities of shortcuts. This research provides an efficient real-time OHT dispatching mechanism for the interbay AMHS with shortcuts and bypasses.</description><edition>English ed.</edition><identifier>ISSN: 1000-9345</identifier><identifier>EISSN: 2192-8258</identifier><identifier>DOI: 10.1007/s10033-017-0100-x</identifier><language>eng</language><publisher>Beijing: Chinese Mechanical Engineering Society</publisher><subject>Algorithms ; AMHS ; Automation ; Computer simulation ; Discrete event systems ; Electrical Machines and Networks ; Electronics and Microelectronics ; Engineering ; Engineering Thermodynamics ; Heat and Mass Transfer ; Instrumentation ; Lead time ; Machines ; Manufacturing ; Materials handling ; Mechanical Engineering ; Operations research ; Original Article ; Performance enhancement ; Power Electronics ; Processes ; Real time ; Theoretical and Applied Mechanics ; 匈牙利算法 ; 区间 ; 实时 ; 平均等待时间 ; 快捷方式 ; 物料搬运系统 ; 调度机制</subject><ispartof>Chinese journal of mechanical engineering, 2017-05, Vol.30 (3), p.663-675</ispartof><rights>Chinese Mechanical Engineering Society and Springer-Verlag Berlin Heidelberg 2017</rights><rights>Chinese Journal of Mechanical Engineering is a copyright of Springer, (2017). 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All Rights Reserved.</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c377t-224dec25421c354c041ed2ed9fe359228a3f6401628f8e85f47092af57fa7d2e3</citedby><cites>FETCH-LOGICAL-c377t-224dec25421c354c041ed2ed9fe359228a3f6401628f8e85f47092af57fa7d2e3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttp://image.cqvip.com/vip1000/qk/85891X/85891X.jpg</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids></links><search><creatorcontrib>PAN, Cong</creatorcontrib><creatorcontrib>ZHANG, Jie</creatorcontrib><creatorcontrib>QIN, Wei</creatorcontrib><title>Real-time OHT Dispatching Mechanism for the Interbay Automated Material Handling System with Shortcuts and Bypasses</title><title>Chinese journal of mechanical engineering</title><addtitle>Chin. J. Mech. Eng</addtitle><addtitle>Chinese Journal of Mechanical Engineering</addtitle><description>As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has received much attention. This problem is first formu- lated as a special form of assignment problem and it is proved that more than one solution will be obtained by Hungarian algorithm simultaneously. Through proposing and strictly proving two propositions related to the char- acteristics of these solutions, a modified Hungarian algo- rithm is designed to distinguish these solutions. Finally, a new real-time OHT dispatching method is carefully designed by implementing the solution obtained by the modified Hungarian algorithm. The experimental results of discrete event simulations show that, compared with con- ventional Hungarian algorithm dispatching method, the proposed dispatching method that chooses the solution with the maximum variance respectively reduces on average 4 s of the average waiting time and average lead time of wafer lots, and its performance is rather stable in multiple dif- ferent scenarios of the interbay AMHS with different quantities of shortcuts. This research provides an efficient real-time OHT dispatching mechanism for the interbay AMHS with shortcuts and bypasses.</description><subject>Algorithms</subject><subject>AMHS</subject><subject>Automation</subject><subject>Computer simulation</subject><subject>Discrete event systems</subject><subject>Electrical Machines and Networks</subject><subject>Electronics and Microelectronics</subject><subject>Engineering</subject><subject>Engineering Thermodynamics</subject><subject>Heat and Mass Transfer</subject><subject>Instrumentation</subject><subject>Lead time</subject><subject>Machines</subject><subject>Manufacturing</subject><subject>Materials handling</subject><subject>Mechanical Engineering</subject><subject>Operations research</subject><subject>Original Article</subject><subject>Performance enhancement</subject><subject>Power Electronics</subject><subject>Processes</subject><subject>Real time</subject><subject>Theoretical and Applied Mechanics</subject><subject>匈牙利算法</subject><subject>区间</subject><subject>实时</subject><subject>平均等待时间</subject><subject>快捷方式</subject><subject>物料搬运系统</subject><subject>调度机制</subject><issn>1000-9345</issn><issn>2192-8258</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><sourceid>ABUWG</sourceid><sourceid>AFKRA</sourceid><sourceid>AZQEC</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><recordid>eNp9kcFvFCEYxYnRxLX6B3gjevIwCh_DwBxrq26TNk1sPRPKfMzMZofZApvu_veymcbePPAR4PfeS3iEfOTsK2dMfUtlClExrspirDq8IivgLVQapH5NVuWOVa2o5VvyLqVNOTWc6xVJv9FuqzxOSG_X9_RyTDub3TCGnt6gG2wY00T9HGkekF6FjPHBHun5Ps-TzdjRmzLjaLd0bUO3PcnujinjRJ_GPNC7YY7Z7XOi5ZV-P-5sSpjekzfebhN-eN7PyJ-fP-4v1tX17a-ri_PrygmlcgVQd-hA1sCdkLVjNccOsGs9CtkCaCt8UzPegPYatfS1Yi1YL5W3qoDijHxZfJ9s8Db0ZjPvYyiJZnPo3eHBIJT_YoJxXdjPC7uL8-MeU36BAWQrlADVFIovlItzShG92cVxsvFoODOnHszSgym-5tSDORQNLJpU2NBjfHH-n-jTc9Awh_6x6P4lNQp4IxstxV-LJZZx</recordid><startdate>20170501</startdate><enddate>20170501</enddate><creator>PAN, Cong</creator><creator>ZHANG, Jie</creator><creator>QIN, Wei</creator><general>Chinese Mechanical Engineering Society</general><general>Springer Nature B.V</general><general>School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China</general><scope>2RA</scope><scope>92L</scope><scope>CQIGP</scope><scope>W92</scope><scope>~WA</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>L6V</scope><scope>M7S</scope><scope>PIMPY</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>PTHSS</scope><scope>2B.</scope><scope>4A8</scope><scope>92I</scope><scope>93N</scope><scope>PSX</scope><scope>TCJ</scope></search><sort><creationdate>20170501</creationdate><title>Real-time OHT Dispatching Mechanism for the Interbay Automated Material Handling System with Shortcuts and Bypasses</title><author>PAN, Cong ; 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J. Mech. Eng</stitle><addtitle>Chinese Journal of Mechanical Engineering</addtitle><date>2017-05-01</date><risdate>2017</risdate><volume>30</volume><issue>3</issue><spage>663</spage><epage>675</epage><pages>663-675</pages><issn>1000-9345</issn><eissn>2192-8258</eissn><abstract>As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has received much attention. This problem is first formu- lated as a special form of assignment problem and it is proved that more than one solution will be obtained by Hungarian algorithm simultaneously. Through proposing and strictly proving two propositions related to the char- acteristics of these solutions, a modified Hungarian algo- rithm is designed to distinguish these solutions. Finally, a new real-time OHT dispatching method is carefully designed by implementing the solution obtained by the modified Hungarian algorithm. The experimental results of discrete event simulations show that, compared with con- ventional Hungarian algorithm dispatching method, the proposed dispatching method that chooses the solution with the maximum variance respectively reduces on average 4 s of the average waiting time and average lead time of wafer lots, and its performance is rather stable in multiple dif- ferent scenarios of the interbay AMHS with different quantities of shortcuts. This research provides an efficient real-time OHT dispatching mechanism for the interbay AMHS with shortcuts and bypasses.</abstract><cop>Beijing</cop><pub>Chinese Mechanical Engineering Society</pub><doi>10.1007/s10033-017-0100-x</doi><tpages>13</tpages><edition>English ed.</edition><oa>free_for_read</oa></addata></record> |
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| issn | 1000-9345 2192-8258 |
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| source | Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals; Alma/SFX Local Collection |
| subjects | Algorithms AMHS Automation Computer simulation Discrete event systems Electrical Machines and Networks Electronics and Microelectronics Engineering Engineering Thermodynamics Heat and Mass Transfer Instrumentation Lead time Machines Manufacturing Materials handling Mechanical Engineering Operations research Original Article Performance enhancement Power Electronics Processes Real time Theoretical and Applied Mechanics 匈牙利算法 区间 实时 平均等待时间 快捷方式 物料搬运系统 调度机制 |
| title | Real-time OHT Dispatching Mechanism for the Interbay Automated Material Handling System with Shortcuts and Bypasses |
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