Structure and tribological properties of Ti-containing amorphous carbon coatings prepared by cathode arc-enhanced middle-frequency magnetron sputtering

Ti-containing amorphous carbon （Ti-aC） coatings were deposited on cemented carbide and Si substratcs by cathode-arc-enhanced closed field middle-frequency unbalanced magnetron sputtering. The coatings were studied by using atomic force microscopy, Raman scattering, nanoindentation, and pin-on-disk t...

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Veröffentlicht in:	Nuclear science and techniques 2006, Vol.17 (2), p.78-82
Hauptverfasser:	YANG, Bing, HUANG, Zhi-Hong, FAN, Xiang-Jun, FU, De-Jun
Format:	Artikel
Sprache:	eng
Schlagworte:	Arc-enhanced magnetron sputtering Diamond-like carbon Hardness O484.4 Tribological performance 摩擦性能 磁控管飞溅 类金刚石碳
Online-Zugang:	Volltext
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