Organic-inorganic Hybrids Towards the Preparation of Nanoporous Composite Thin Films for Microelectronic Application

Silicon containing materials have traditionally been used in microelectronic fabrication. Semiconductor devices often have one or more arrays of patterned interconnect levels that serve to electrically couple the individual circuit elements forming an integrated circuit. These interconnect levels ar...

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Bibliographische Detailangaben

Veröffentlicht in:	Chemical research in Chinese universities 2002-05, Vol.18 (2), p.178-182
1. Verfasser:	DuanLi Ou Pierre M. Chevalier
Format:	Artikel
Sprache:	eng
Schlagworte:	composite device hybrid Microelectronic Nanoporous Organic-inorganic
Online-Zugang:	Volltext
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