Computation of Capacitance for MEMS Comb-Drive Structures
According to the characteristics of comb-drive structures, the electrical potential field is analyzed; the model based on comer capacitor is presented and solved with the capacitance characteristic formula of nonlinear capacitor. Compared with the results of finite element method simulation, the mod...
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| Veröffentlicht in: | Journal of Beijing Institute of Technology (English Edition) 2009-03, Vol.18 (1), p.1-5 |
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| container_title | Journal of Beijing Institute of Technology (English Edition) |
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| creator | 李明辉 高世桥 刘海鹏 梁新建 |
| description | According to the characteristics of comb-drive structures, the electrical potential field is analyzed; the model based on comer capacitor is presented and solved with the capacitance characteristic formula of nonlinear capacitor. Compared with the results of finite element method simulation, the model based on comer capacitor is more accurate than the models based on infinite parallel plate capacitor and parallel plate capacitor with edge effects. |
| format | Article |
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| ispartof | Journal of Beijing Institute of Technology (English Edition), 2009-03, Vol.18 (1), p.1-5 |
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| language | eng |
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| source | Alma/SFX Local Collection |
| subjects | MEMS 平行板电容器 有限元方法 电容特性 边缘效应 非线性电容 驱动结构 |
| title | Computation of Capacitance for MEMS Comb-Drive Structures |
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