Structural and optical properties of AIN sputtering deposited on sapphire substrates with various orientations

AIN thin films were deposited on c-,a-and r-plane sapphire substrates by the magnetron sputtering technique.The in-fluence of high-temperature thermal annealing (HTTA) on the structural,optical properties as well as surface stoichiometry were comprehensively investigated.The significant narrowing of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	半导体学报（英文版） 2022-02, Vol.43 (2), p.79-85
Hauptverfasser:	Xianchun Peng, Jie Sun, Huan Liu, Liang Li, Qikun Wang, Liang Wu, Wei Guo, Fanping Meng, Li Chen, Feng Huang, Jichun Ye
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!