Method of making fused silica by decomposing siloxanes

This invention relates to the production of high purity fused silica glass through oxidation or flame hydrolysis of a vaporizable silicon-containing compound. More particularly, this invention is directed to the use of vaporizable, halide-free compounds in said production. In the preferred practice,...

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Hauptverfasser:	Dobbins, Michael S, McLay, Robert E
Format:	Patent
Sprache:	eng
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creator	Dobbins, Michael S McLay, Robert E
description	This invention relates to the production of high purity fused silica glass through oxidation or flame hydrolysis of a vaporizable silicon-containing compound. More particularly, this invention is directed to the use of vaporizable, halide-free compounds in said production. In the preferred practice, a polymethylsiloxane comprises said vaporizable, halide-free compound.
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title	Method of making fused silica by decomposing siloxanes
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