Flow control module with a thermal mass flow meter
A flow control module with a thermal mass flow meter is provided. The thermal mass flow meter facilitates measuring both a flow rate and a temperature of a fluid passing through the flow control module. Fluids may experience different flow characteristics at different temperature ranges. The flow co...
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| Format: | Patent |
| Sprache: | eng |
| Online-Zugang: | Volltext bestellen |
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