MEMS device and manufacturing method thereof

A MEMS device and a manufacturing method thereof. The manufacturing method comprises: forming a CMOS circuit; and forming a MEMS module on the CMOS circuit which is coupling to the MEMS module and configured to drive the MEMS module. Forming the MEMS module comprises: forming a protective layer; for...

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Bibliographische Detailangaben

Hauptverfasser:	HANGZHOU SILAN MICROELECTRONICS CO., LTD, HANGZHOU SILAN INTEGRATED CIRCUIT CO., LTD
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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