Dual-purpose vias for use in ceramic pedestals

A ceramic pedestal assembly and a method of forming a ceramic pedestal assembly is provided. The ceramic pedestal assembly includes a ceramic substrate defining an upper surface and a lower surface, at least one via extending through the ceramic substrate, an upper conductive foil layer extending ac...

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Bibliographische Detailangaben

1. Verfasser:	Wallow Electric Manufacturing Company
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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