LDMOS using a combination of enhanced dielectric stress layer and dummy gates

First example embodiments comprise forming a stress layer over a MOS transistor (such as a LDMOS Tx) comprised of a channel and first, second and third junction regions. The stress layer creates a stress in the channel and the second junction region of the Tx. Second example embodiments comprise for...

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Hauptverfasser: Chu, Sanford, Li, Yisuo, Zhang, Guowei, Verma, Purakh Raj
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creator Chu, Sanford
Li, Yisuo
Zhang, Guowei
Verma, Purakh Raj
description First example embodiments comprise forming a stress layer over a MOS transistor (such as a LDMOS Tx) comprised of a channel and first, second and third junction regions. The stress layer creates a stress in the channel and the second junction region of the Tx. Second example embodiments comprise forming a MOS FET and at least a dummy gate over a substrate. The MOS is comprised of a gate, channel, source, drain and offset drain. At least one dummy gate is over the offset drain. A stress layer is formed over the MOS and the dummy gate. The stress layer and the dummy gate improve the stress in the channel and offset drain region.
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Ltd</creatorcontrib><collection>USPTO Issued Patents</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Chu, Sanford</au><au>Li, Yisuo</au><au>Zhang, Guowei</au><au>Verma, Purakh Raj</au><aucorp>GLOBALFOUNDRIES Singapore Pte. Ltd</aucorp><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>LDMOS using a combination of enhanced dielectric stress layer and dummy gates</title><date>2012-12-18</date><risdate>2012</risdate><abstract>First example embodiments comprise forming a stress layer over a MOS transistor (such as a LDMOS Tx) comprised of a channel and first, second and third junction regions. The stress layer creates a stress in the channel and the second junction region of the Tx. Second example embodiments comprise forming a MOS FET and at least a dummy gate over a substrate. The MOS is comprised of a gate, channel, source, drain and offset drain. 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title LDMOS using a combination of enhanced dielectric stress layer and dummy gates
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