Semiconductor workpiece apparatus

Various embodiments of an apparatus for holding and processing semiconductor workpieces are provided. In one aspect, an apparatus is provided that includes a first base, a second base and three elongated members coupled to and between the first base and the second base. The three elongated members a...

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Bibliographische Detailangaben

1. Verfasser:	Loo, John
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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