Multi-stage substrate cleaning method and apparatus

A first application of a cleaning material is made to a surface of a substrate. The cleaning material includes one or more viscoelastic materials for entrapping contaminants present on the surface of the substrate. A first application of a rinsing fluid is made to the surface of the substrate so as...

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Bibliographische Detailangaben

Hauptverfasser:	Kholodenko, Arnold, Mikhaylichenko, Katrina, Lin, Cheng-Yu (Sean), Wilcoxson, Mark, Ginzburg, Leon, Kawaguchi, Mark
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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